Phosphorus-doped thin silica films characterized by magic-angle spinning nuclear magnetic resonance spectroscopy

H.J. Jacobsen; J. Skibsted; Martin Kristensen; Dan Zauner

doi:10.1063/1.1351545

Phosphorus-doped thin silica films characterized by magic-angle spinning nuclear magnetic resonance spectroscopy

H.J. Jacobsen
, J. Skibsted
, Martin Kristensen
, Dan Zauner

Aarhus University

Research output: Contribution to journal › Journal article › Research › peer-review

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Abstract

Magic-angle spinning nuclear magnetic resonance spectra of 31P and 29Si have been achieved for a thin silica film doped with only 1.8% 31P and deposited by plasma enhanced chemical vapor deposition on a pure silicon wafer. The observation of a symmetric 31P chemical shift tensor is consistent with a three-fold symmetric (–O–)3P = O chemical structure. We find that the glass structure is very similar to that found in fiber preforms. ©2001 American Institute of Physics.

Original language	English
Journal	Journal of Applied Physics
Volume	89
Issue number	7
Pages (from-to)	4134-4138
ISSN	0021-8979
DOIs	https://doi.org/10.1063/1.1351545
Publication status	Published - 2001

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Copyright (2001) American Institute of Physics. This article may be downloaded for personal use only. Any other use requires prior permission of the author and the American Institute of Physics.

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abstract = "Magic-angle spinning nuclear magnetic resonance spectra of 31P and 29Si have been achieved for a thin silica film doped with only 1.8\% 31P and deposited by plasma enhanced chemical vapor deposition on a pure silicon wafer. The observation of a symmetric 31P chemical shift tensor is consistent with a three-fold symmetric (–O–)3P = O chemical structure. We find that the glass structure is very similar to that found in fiber preforms. {\textcopyright}2001 American Institute of Physics.",

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AU - Jacobsen, H.J.

AU - Skibsted, J.

AU - Kristensen, Martin

AU - Zauner, Dan

N1 - Copyright (2001) American Institute of Physics. This article may be downloaded for personal use only. Any other use requires prior permission of the author and the American Institute of Physics.

PY - 2001

Y1 - 2001

N2 - Magic-angle spinning nuclear magnetic resonance spectra of 31P and 29Si have been achieved for a thin silica film doped with only 1.8% 31P and deposited by plasma enhanced chemical vapor deposition on a pure silicon wafer. The observation of a symmetric 31P chemical shift tensor is consistent with a three-fold symmetric (–O–)3P = O chemical structure. We find that the glass structure is very similar to that found in fiber preforms. ©2001 American Institute of Physics.

AB - Magic-angle spinning nuclear magnetic resonance spectra of 31P and 29Si have been achieved for a thin silica film doped with only 1.8% 31P and deposited by plasma enhanced chemical vapor deposition on a pure silicon wafer. The observation of a symmetric 31P chemical shift tensor is consistent with a three-fold symmetric (–O–)3P = O chemical structure. We find that the glass structure is very similar to that found in fiber preforms. ©2001 American Institute of Physics.

U2 - 10.1063/1.1351545

DO - 10.1063/1.1351545

M3 - Journal article

SN - 0021-8979

VL - 89

SP - 4134

EP - 4138

JO - Journal of Applied Physics

JF - Journal of Applied Physics

IS - 7

ER -

Phosphorus-doped thin silica films characterized by magic-angle spinning nuclear magnetic resonance spectroscopy

Abstract

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