Phosphorus-doped thin silica films characterized by magic-angle spinning nuclear magnetic resonance spectroscopy

H.J. Jacobsen, J. Skibsted, Martin Kristensen, Dan Zauner

    Research output: Contribution to journalJournal articleResearchpeer-review

    456 Downloads (Pure)

    Abstract

    Magic-angle spinning nuclear magnetic resonance spectra of 31P and 29Si have been achieved for a thin silica film doped with only 1.8% 31P and deposited by plasma enhanced chemical vapor deposition on a pure silicon wafer. The observation of a symmetric 31P chemical shift tensor is consistent with a three-fold symmetric (–O–)3P = O chemical structure. We find that the glass structure is very similar to that found in fiber preforms. ©2001 American Institute of Physics.
    Original languageEnglish
    JournalJournal of Applied Physics
    Volume89
    Issue number7
    Pages (from-to)4134-4138
    ISSN0021-8979
    DOIs
    Publication statusPublished - 2001

    Bibliographical note

    Copyright (2001) American Institute of Physics. This article may be downloaded for personal use only. Any other use requires prior permission of the author and the American Institute of Physics.

    Fingerprint

    Dive into the research topics of 'Phosphorus-doped thin silica films characterized by magic-angle spinning nuclear magnetic resonance spectroscopy'. Together they form a unique fingerprint.

    Cite this