Phosphorus-doped thin silica films characterized by magic-angle spinning nuclear magnetic resonance spectroscopy

H.J. Jacobsen, J. Skibsted, Martin Kristensen, Dan Zauner

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Magic-angle spinning nuclear magnetic resonance spectra of 31P and 29Si have been achieved for a thin silica film doped with only 1.8% 31P and deposited by plasma enhanced chemical vapor deposition on a pure silicon wafer. The observation of a symmetric 31P chemical shift tensor is consistent with a three-fold symmetric (–O–)3P = O chemical structure. We find that the glass structure is very similar to that found in fiber preforms. ©2001 American Institute of Physics.
Original languageEnglish
JournalJournal of Applied Physics
Issue number7
Pages (from-to)4134-4138
Publication statusPublished - 2001

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Copyright (2001) American Institute of Physics. This article may be downloaded for personal use only. Any other use requires prior permission of the author and the American Institute of Physics.

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