Abstract
Magic-angle spinning nuclear magnetic resonance spectra of 31P and 29Si have been achieved for a thin silica film doped with only 1.8% 31P and deposited by plasma enhanced chemical vapor deposition on a pure silicon wafer. The observation of a symmetric 31P chemical shift tensor is consistent with a three-fold symmetric (–O–)3P = O chemical structure. We find that the glass structure is very similar to that found in fiber preforms. ©2001 American Institute of Physics.
Original language | English |
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Journal | Journal of Applied Physics |
Volume | 89 |
Issue number | 7 |
Pages (from-to) | 4134-4138 |
ISSN | 0021-8979 |
DOIs | |
Publication status | Published - 2001 |