Magic-angle spinning nuclear magnetic resonance spectra of 31P and 29Si have been achieved for a thin silica film doped with only 1.8% 31P and deposited by plasma enhanced chemical vapor deposition on a pure silicon wafer. The observation of a symmetric 31P chemical shift tensor is consistent with a three-fold symmetric (–O–)3P = O chemical structure. We find that the glass structure is very similar to that found in fiber preforms. ©2001 American Institute of Physics.
Bibliographical noteCopyright (2001) American Institute of Physics. This article may be downloaded for personal use only. Any other use requires prior permission of the author and the American Institute of Physics.
Jacobsen, H. J., Skibsted, J., Kristensen, M., & Zauner, D. (2001). Phosphorus-doped thin silica films characterized by magic-angle spinning nuclear magnetic resonance spectroscopy. Journal of Applied Physics, 89(7), 4134-4138. https://doi.org/10.1063/1.1351545