Phosphorus diffusion in float zone silicon crystal growth

Theis Leth Larsen

Research output: Book/Report › Ph.D. thesis

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Phosphor diffusion i float zone silicium krystal dyrkning
Larsen, T. L. (PhD Student), Sørensen, M. P. (Main Supervisor), Lynov, J.-P. (Examiner) & Hansen, O. (Supervisor)
Innovationsfonden
01/08/1997 → 20/12/2000
Project: PhD