Performance verification of focus variation and confocal microscopes measuring tilted ultra-fine surfaces

Danilo Quagliotti, Federico Baruffi, Guido Tosello, Stefania Gasparin, Massimiliano Annoni, Paolo Parenti, Rene Sobiecki, Hans Nørgaard Hansen

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Abstract

The behaviour of two optical instruments, scilicet a laser scanning confocal microscope and a focus-variation microscope, was investigated considering measurements of tilted surfaces. The measured samples were twelve steel artefacts for mould surface finish reference, covering Sa roughness parameter in the range (101—103) nm. The 3D surface texture parameters considered were Sa, Sq and Sdq. The small working distance of the confocal microscope objectives influenced the measurement setup, preventing from selecting a high tilting angle. The investigation was carried out comparing measurements of flat surfaces (0° tilt) with measurements of 12.5° tilted surfaces. The confocal microscope results showed a high sensitivity to tilting due to the laser beam reflection on the metal surfaces. The focus variation microscope results were more robust with respect to the considered angular variation, although they were out of the instrument operating range except for one of the twelve artefacts.
Original languageEnglish
Title of host publicationProceedings of the 16th International Conference of the European Society for Precision Engineering and Nanotechnology, EUSPEN 2016
Number of pages2
Publication date2016
Publication statusPublished - 2016
Event16th International Conference of the European Society for Precision Engineering and Nanotechnology - University of Nottingham, Nottingham, United Kingdom
Duration: 30 May 20163 Jun 2016

Conference

Conference16th International Conference of the European Society for Precision Engineering and Nanotechnology
LocationUniversity of Nottingham
CountryUnited Kingdom
CityNottingham
Period30/05/201603/06/2016

Keywords

  • Optical microscope
  • Tilted surface
  • Confocal
  • Focus variation

Cite this

Quagliotti, D., Baruffi, F., Tosello, G., Gasparin, S., Annoni, M., Parenti, P., Sobiecki, R., & Hansen, H. N. (2016). Performance verification of focus variation and confocal microscopes measuring tilted ultra-fine surfaces. In Proceedings of the 16th International Conference of the European Society for Precision Engineering and Nanotechnology, EUSPEN 2016