Abstract
We design, fabricate, and characterize split-ring resonator (SRR) based planar terahertz metamaterials (MMs) on ultrathin silicon nitride substrates for biosensing applications. Proof-of-principle demonstration of increased sensitivity in thin substrate SRR-MMs is shown by detection of doped and undoped protein thin films (silk fibroin) of various thicknesses and by monitoring transmission changes using terahertz time-domain spectroscopy. SRR-MMs fabricated on thin film substrates show significantly better performance than identical SRR-MMs fabricated on bulk silicon substrates paving the way for improved biological and chemical sensing applications. (C) 2010 American Institute of Physics.
Original language | English |
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Journal | Applied Physics Letters |
Volume | 97 |
Issue number | 26 |
Pages (from-to) | 261909 |
Number of pages | 1 |
ISSN | 0003-6951 |
DOIs | |
Publication status | Published - 2010 |
Externally published | Yes |