Performance enhancement of terahertz metamaterials on ultrathin substrates for sensing applications

H. Tao, A.C. Strikwerda, M. Liu, J.P. Mondia, E. Ekmekci, K. Fan, D.L. Kaplan, W.J. Padilla, X. Zhang, R.D. Averitt

Research output: Contribution to journalJournal articleResearchpeer-review

Abstract

We design, fabricate, and characterize split-ring resonator (SRR) based planar terahertz metamaterials (MMs) on ultrathin silicon nitride substrates for biosensing applications. Proof-of-principle demonstration of increased sensitivity in thin substrate SRR-MMs is shown by detection of doped and undoped protein thin films (silk fibroin) of various thicknesses and by monitoring transmission changes using terahertz time-domain spectroscopy. SRR-MMs fabricated on thin film substrates show significantly better performance than identical SRR-MMs fabricated on bulk silicon substrates paving the way for improved biological and chemical sensing applications. (C) 2010 American Institute of Physics.
Original languageEnglish
JournalApplied Physics Letters
Volume97
Issue number26
Pages (from-to)261909
Number of pages1
ISSN0003-6951
DOIs
Publication statusPublished - 2010
Externally publishedYes

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