Performance assessment of a low-cost spinner design

Amirali Abbaspourmani; Thomas Tølbøl  Sørensen; Bjarke Sørensen Jessen; Patrick Rebsdorf Whelan; Mohammad Hossein Tarokh; Emil Højlund-Nielsen; Tim  Booth

Performance assessment of a low-cost spinner design

Amirali Abbaspourmani, Thomas Tølbøl Sørensen, Bjarke Sørensen Jessen, Patrick Rebsdorf Whelan, Mohammad Hossein Tarokh, Emil Højlund-Nielsen, Tim Booth^*

^*Corresponding author for this work

Department of Physics

Copenhagen Nanosystems ApS

Research output: Contribution to conference › Poster › Research › peer-review

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Abstract

Resist-based lithography require the application of a layer of sacrificial resist for lift-off, etch masking or similar processes. Typical clean-room based resist spinners are expensive, and being situated in a clean room places strict requirements on sample cleanliness and materials compatibility. As a result, there is a strong need for low cost spinner systems outside of traditional cleanroom environments for development and fast device prototyping purposes. Such systems would enable application of thin resist layers for microfabrication prototyping in the academic, educational and hobbyist communities, with a low-cost barrier for entry

Original language	English
Publication date	2018
Number of pages	1
Publication status	Published - 2018
Event	44th International conference on Micro and Nano Engineering - Copenhagen, Denmark Duration: 24 Sept 2018 → 27 Sept 2018 Conference number: 44 http://mne2018.org

Conference

Conference	44th International conference on Micro and Nano Engineering
Number	44
Country/Territory	Denmark
City	Copenhagen
Period	24/09/2018 → 27/09/2018
Internet address	http://mne2018.org

Keywords

Spin coating
Thin films
Ellipsometry
Optical mapping
3D printing
PID and feed-forward controllers

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title = "Performance assessment of a low-cost spinner design",

abstract = "Resist-based lithography require the application of a layer of sacrificial resist for lift-off, etch masking or similar processes. Typical clean-room based resist spinners are expensive, and being situated in a clean room places strict requirements on sample cleanliness and materials compatibility. As a result, there is a strong need for low cost spinner systems outside of traditional cleanroom environments for development and fast device prototyping purposes. Such systems would enable application of thin resist layers for microfabrication prototyping in the academic, educational and hobbyist communities, with a low-cost barrier for entry",

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T1 - Performance assessment of a low-cost spinner design

AU - Abbaspourmani, Amirali

AU - Sørensen, Thomas Tølbøl

AU - Jessen, Bjarke Sørensen

AU - Whelan, Patrick Rebsdorf

AU - Tarokh, Mohammad Hossein

AU - Højlund-Nielsen, Emil

AU - Booth, Tim

N1 - Conference code: 44

PY - 2018

Y1 - 2018

N2 - Resist-based lithography require the application of a layer of sacrificial resist for lift-off, etch masking or similar processes. Typical clean-room based resist spinners are expensive, and being situated in a clean room places strict requirements on sample cleanliness and materials compatibility. As a result, there is a strong need for low cost spinner systems outside of traditional cleanroom environments for development and fast device prototyping purposes. Such systems would enable application of thin resist layers for microfabrication prototyping in the academic, educational and hobbyist communities, with a low-cost barrier for entry

AB - Resist-based lithography require the application of a layer of sacrificial resist for lift-off, etch masking or similar processes. Typical clean-room based resist spinners are expensive, and being situated in a clean room places strict requirements on sample cleanliness and materials compatibility. As a result, there is a strong need for low cost spinner systems outside of traditional cleanroom environments for development and fast device prototyping purposes. Such systems would enable application of thin resist layers for microfabrication prototyping in the academic, educational and hobbyist communities, with a low-cost barrier for entry

KW - Spin coating

KW - Thin films

KW - Ellipsometry

KW - Optical mapping

KW - 3D printing

KW - PID and feed-forward controllers

M3 - Poster

T2 - 44th International conference on Micro and Nano Engineering

Y2 - 24 September 2018 through 27 September 2018

ER -

Performance assessment of a low-cost spinner design

Abstract

Conference

Keywords

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