Oxidation-stripping of n-type Si films for precise determination of the profiles of Dornor-type ions implanted in Si

W. Przyborski, Jørn Roed, Jørgen Emil Lippert, L. Sarholt-Kristensen

Research output: Book/Report › Report › Research

Original language	English

Number of pages	14
Publication status	Published - 1968

Keywords

@book{aeb60ce0142049d1b932d43285c960b3,

title = "Oxidation-stripping of n-type Si films for precise determination of the profiles of Dornor-type ions implanted in Si",

keywords = "Ris{\o}-M-776",

author = "W. Przyborski and J{\o}rn Roed and Lippert, {J{\o}rgen Emil} and L. Sarholt-Kristensen",

year = "1968",

language = "English",

series = "Ris{\o}-M",

number = "776",

}

TY - RPRT

T1 - Oxidation-stripping of n-type Si films for precise determination of the profiles of Dornor-type ions implanted in Si

AU - Przyborski, W.

AU - Roed, Jørn

AU - Lippert, Jørgen Emil

AU - Sarholt-Kristensen, L.

PY - 1968

Y1 - 1968

KW - Risø-M-776

M3 - Report

T3 - Risø-M

BT - Oxidation-stripping of n-type Si films for precise determination of the profiles of Dornor-type ions implanted in Si

ER -