Oxidation-stripping of n-type Si films for precise determination of the profiles of Dornor-type ions implanted in Si

W. Przyborski, Jørn Roed, Jørgen Emil Lippert, L. Sarholt-Kristensen

    Research output: Book/ReportReport

    Original languageEnglish
    Number of pages14
    Publication statusPublished - 1968
    SeriesRisø-M
    Number776
    ISSN0418-6435

    Keywords

    • Risø-M-776

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