O2 plasma assisted wafer bonding at room temperature

A. Egebjerg, M. Poulsen, O. Bunk, M.M. Nielsen, F. Jensen, R. Feidenhans'l

    Research output: Chapter in Book/Report/Conference proceedingBook chapterResearchpeer-review

    Original languageEnglish
    Title of host publicationHASYLAB annual report 2002. Part 1
    Place of PublicationHamburg
    PublisherHASYLAB
    Publication date2003
    Publication statusPublished - 2003

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