Organic ice resists: condensed small molecules as spin-free volatile E-beam resists

William Tiddi, Hoà Lê Thanh, Anna Elsukova, Marco Beleggia, Anpan Han

    Research output: Contribution to conferenceConference abstract for conferenceResearchpeer-review

    146 Downloads (Pure)
    Original languageEnglish
    Publication date2017
    Number of pages1
    Publication statusPublished - 2017
    Event43rd International conference on Micro and Nano Engineering - Braga, Portugal
    Duration: 18 Sept 201722 Sept 2017
    Conference number: 43

    Conference

    Conference43rd International conference on Micro and Nano Engineering
    Number43
    Country/TerritoryPortugal
    CityBraga
    Period18/09/201722/09/2017

    Keywords

    • Electron-beam lithography
    • Negative organic resist
    • Condensed films

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