Organic ice resists: condensed small molecules as spin-free volatile E-beam resists

William Tiddi, Hoà Lê Thanh, Anna Elsukova, Marco Beleggia, Anpan Han

Research output: Contribution to conference › Conference abstract for conference › Research › peer-review

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Original language	English
Publication date	2017
Number of pages	1
Publication status	Published - 2017
Event	43rd International conference on Micro and Nano Engineering - Braga, Portugal Duration: 18 Sep 2017 → 22 Sep 2017 Conference number: 43

Conference	43rd International conference on Micro and Nano Engineering
Number	43
Country/Territory	Portugal
City	Braga
Period	18/09/2017 → 22/09/2017

Keywords

@conference{3e802dddc6de4ff7b4c054dc17395ea9,

title = "Organic ice resists: condensed small molecules as spin-free volatile E-beam resists",

keywords = "Electron-beam lithography, Negative organic resist, Condensed films",

author = "William Tiddi and {L{\^e} Thanh}, Ho{\`a} and Anna Elsukova and Marco Beleggia and Anpan Han",

year = "2017",

language = "English",

note = "43rd International conference on Micro and Nano Engineering, MNE 2017 ; Conference date: 18-09-2017 Through 22-09-2017",

}

TY - ABST

T1 - Organic ice resists: condensed small molecules as spin-free volatile E-beam resists

AU - Tiddi, William

AU - Lê Thanh, Hoà

AU - Elsukova, Anna

AU - Beleggia, Marco

AU - Han, Anpan

N1 - Conference code: 43

PY - 2017

Y1 - 2017

KW - Electron-beam lithography

KW - Negative organic resist

KW - Condensed films

M3 - Conference abstract for conference

T2 - 43rd International conference on Micro and Nano Engineering

Y2 - 18 September 2017 through 22 September 2017

ER -