Opto-mechanical accelerometer based on strain sensing by a Bragg grating in a planar waveguide

Torben Storgaard Larsen, Otto Leistiko, Siebe Bouwstra

    Research output: Contribution to journalJournal articleResearchpeer-review

    Abstract

    In this paper we present an opto-mechanical sensor based on a Bragg grating as the strain-sensing element. The motivation for choosing this alternative way of strain sensing is that the sensed information is directly encoded into a wavelength, which is an absolute parameter insensitive to typical intensity and phase noise. Recently, it has been shown that fibre-optic strain sensors based on this technique are capable of resolving dynamic strain down to 0.6×10-9(Hz) -1/2. To demonstrate that this new detection principle can also be used for high-performance microsensors, we have chosen to fabricate a silicon opto-mechanical accelerometer based on strain sensing by a Bragg grating in a planar waveguide. The fabrication of the accelerometer includes KOH wet etching of (110) silicon, controlling stress in PECVD glass waveguides and direct UV writing of Bragg gratings.
    Original languageEnglish
    JournalSensors and Actuators A: Physical
    Volume52
    Issue number1-3
    Pages (from-to)25-32
    ISSN0924-4247
    DOIs
    Publication statusPublished - 1996

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