TY - JOUR
T1 - Opto-mechanical accelerometer based on strain sensing by a Bragg grating in a planar waveguide
AU - Larsen, Torben Storgaard
AU - Leistiko, Otto
AU - Bouwstra, Siebe
PY - 1996
Y1 - 1996
N2 - In this paper we present an opto-mechanical sensor based on a Bragg grating as the strain-sensing element. The motivation for choosing this alternative way of strain sensing is that the sensed information is directly encoded into a wavelength, which is an absolute parameter insensitive to typical intensity and phase noise. Recently, it has been shown that fibre-optic strain sensors based on this technique are capable of resolving dynamic strain down to 0.6×10-9(Hz) -1/2. To demonstrate that this new detection principle can also be used for high-performance microsensors, we have chosen to fabricate a silicon opto-mechanical accelerometer based on strain sensing by a Bragg grating in a planar waveguide. The fabrication of the accelerometer includes KOH wet etching of (110) silicon, controlling stress in PECVD glass waveguides and direct UV writing of Bragg gratings.
AB - In this paper we present an opto-mechanical sensor based on a Bragg grating as the strain-sensing element. The motivation for choosing this alternative way of strain sensing is that the sensed information is directly encoded into a wavelength, which is an absolute parameter insensitive to typical intensity and phase noise. Recently, it has been shown that fibre-optic strain sensors based on this technique are capable of resolving dynamic strain down to 0.6×10-9(Hz) -1/2. To demonstrate that this new detection principle can also be used for high-performance microsensors, we have chosen to fabricate a silicon opto-mechanical accelerometer based on strain sensing by a Bragg grating in a planar waveguide. The fabrication of the accelerometer includes KOH wet etching of (110) silicon, controlling stress in PECVD glass waveguides and direct UV writing of Bragg gratings.
U2 - 10.1016/0924-4247(96)80121-X
DO - 10.1016/0924-4247(96)80121-X
M3 - Journal article
SN - 0924-4247
VL - 52
SP - 25
EP - 32
JO - Sensors and Actuators A: Physical
JF - Sensors and Actuators A: Physical
IS - 1-3
ER -