Optimization of Cantilever Probes for Atomic Force Microscopy

Research output: Chapter in Book/Report/Conference proceeding › Article in proceedings › Research › peer-review

Original language	English
Title of host publication	Design, Test, and Microfrabrication of MEMS and MOEMS
Place of Publication	Washington - USA
Publisher	SPIE - The International Society for Optical Engineering
Publication date	1999
Pages	131-140
Publication status	Published - 1999
Event	DTM - 99 - Paris - France Duration: 1 Jan 1999 → …

OpenUrl availability

@inproceedings{f48b067125c0414c9f204adb52296ee5,

title = "Optimization of Cantilever Probes for Atomic Force Microscopy",

author = "Pedersen, \{Niels Leergaard\}",

year = "1999",

language = "English",

pages = "131--140",

booktitle = "Design, Test, and Microfrabrication of MEMS and MOEMS",

publisher = "SPIE - The International Society for Optical Engineering",

note = "DTM - 99 ; Conference date: 01-01-1999",

}