Optimised cantilever biosensor with piezoresistive read-out

Peter Rasmussen; J. Thaysen; Ole Hansen; S.C. Eriksen; Anja Boisen

doi:10.1016/S0304-3991(03)00063-9

Optimised cantilever biosensor with piezoresistive read-out

Peter Rasmussen, J. Thaysen, Ole Hansen, S.C. Eriksen, Anja Boisen

Research output: Contribution to journal › Conference article › Research › peer-review

Abstract

We present a cantilever-based biochemical sensor with piezoresistive read-out which has been optimised for measuring surface stress. The resistors and the electrical wiring on the chip are encapsulated in low-pressure chemical vapor deposition (LPCVD) silicon nitride, so that the chip is well suited for operation in liquids. The wiring is titanium silicide which—in contrast to conventional metal wiring—is compatible with the high-temperature LPCVD coating process.

Original language	English
Journal	Ultramicroscopy
Volume	97
Issue number	1-4
Pages (from-to)	371-376
ISSN	0304-3991
DOIs	https://doi.org/10.1016/S0304-3991(03)00063-9
Publication status	Published - 2003
Event	Fourth International Conference on Scanning Probe Microscopy, Sensors and Nanostructures - Las Vegas, NV, United States Duration: 26 May 2002 → 29 May 2002 Conference number: 4

Conference

Conference	Fourth International Conference on Scanning Probe Microscopy, Sensors and Nanostructures
Number	4
Country/Territory	United States
City	Las Vegas, NV
Period	26/05/2002 → 29/05/2002

Keywords

Cantilever
Piezoresistive read-out
Silicide
Surface stress

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10.1016/S0304-3991(03)00063-9

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title = "Optimised cantilever biosensor with piezoresistive read-out",

abstract = "We present a cantilever-based biochemical sensor with piezoresistive read-out which has been optimised for measuring surface stress. The resistors and the electrical wiring on the chip are encapsulated in low-pressure chemical vapor deposition (LPCVD) silicon nitride, so that the chip is well suited for operation in liquids. The wiring is titanium silicide which—in contrast to conventional metal wiring—is compatible with the high-temperature LPCVD coating process.",

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author = "Peter Rasmussen and J. Thaysen and Ole Hansen and S.C. Eriksen and Anja Boisen",

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pages = "371--376",

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T1 - Optimised cantilever biosensor with piezoresistive read-out

AU - Rasmussen, Peter

AU - Thaysen, J.

AU - Hansen, Ole

AU - Eriksen, S.C.

AU - Boisen, Anja

N1 - Conference code: 4

PY - 2003

Y1 - 2003

N2 - We present a cantilever-based biochemical sensor with piezoresistive read-out which has been optimised for measuring surface stress. The resistors and the electrical wiring on the chip are encapsulated in low-pressure chemical vapor deposition (LPCVD) silicon nitride, so that the chip is well suited for operation in liquids. The wiring is titanium silicide which—in contrast to conventional metal wiring—is compatible with the high-temperature LPCVD coating process.

AB - We present a cantilever-based biochemical sensor with piezoresistive read-out which has been optimised for measuring surface stress. The resistors and the electrical wiring on the chip are encapsulated in low-pressure chemical vapor deposition (LPCVD) silicon nitride, so that the chip is well suited for operation in liquids. The wiring is titanium silicide which—in contrast to conventional metal wiring—is compatible with the high-temperature LPCVD coating process.

KW - Cantilever

KW - Piezoresistive read-out

KW - Silicide

KW - Surface stress

U2 - 10.1016/S0304-3991(03)00063-9

DO - 10.1016/S0304-3991(03)00063-9

M3 - Conference article

SN - 0304-3991

VL - 97

SP - 371

EP - 376

JO - Ultramicroscopy

JF - Ultramicroscopy

IS - 1-4

T2 - Fourth International Conference on Scanning Probe Microscopy, Sensors and Nanostructures

Y2 - 26 May 2002 through 29 May 2002

ER -

Optimised cantilever biosensor with piezoresistive read-out

Abstract

Conference

Keywords

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