Optimal design of a microgripper-type actuator based on AlN/Si heterogeneous bimorph

D. P. Ruiz, A. Díaz-Molina, Ole Sigmund, Alberto Donoso, J.C. Bellido, J. L. Sánchez-Rojas

    Research output: Chapter in Book/Report/Conference proceeding › Article in proceedings › Research › peer-review

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