Opticoelectrical Properties of Titanium and Nitrogen codoped In₂O₃ Films prepared by Spray Pyrolysis

Titanium and nitrogen co-doped In2O3 films were prepared using the controlled spray pyrolysis from mixed solution of In(NO3)(3) and TiCl4 on heated glass substrates. Phase composition and morphology of obtained films were identified by XRD, SEM and EDX. Optico-electrical properties of the films were studied by UV-vis spectroscopy, resistance measurements and hot-probe test. By changing the deposition temperature and the concentration ratios of starting solutions, it was found that the films prepared at temperature region of 380 to 420 degrees C from solutions containing 10-40% TiCl4 shown a low resistivity and remarkable photoconductivity in the visible light at room temperature. Obtained titanium and nitrogen co-doped In2O3 films could be promising material for the development of the high efficiency solar cell and optoelectronic devices.