Optically pumped 1550nm wavelength tunable MEMS VCSEL

Research output: Chapter in Book/Report/Conference proceedingArticle in proceedingsResearchpeer-review


The paper presents the design and fabrication of an optically pumped 1550nm tunable MEMS VCSEL with anenclosed MEMS. The MEMS is defined in SOI and the active material, an InP wafer with quantum wells arebonded to the SOI and the last mirror is made from the deposition of dielectric materials. The design bringsin flexibility to fabricate MEMS VCSELs over a wider range of wavelengths. The paper discusses results fromthe simulations and bonding results from fabrication. The device will push the boundaries for wavelength sweepspeed and bandwidth.
Original languageEnglish
Title of host publicationProceedings of SPIE
Number of pages10
PublisherSPIE - International Society for Optical Engineering
Publication date2016
Article number97600X-1
ISBN (Electronic)9781628419955
Publication statusPublished - 2016
EventMOEMS and Miniaturized Systems XV: SPIE Conference 9760 - San Francisco, California, United States
Duration: 15 Feb 201617 Feb 2016


ConferenceMOEMS and Miniaturized Systems XV
CountryUnited States
CitySan Francisco, California

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