Optically driven microtools fabricated by UV lithography and RIE

P.J. Rodrigo, L. Gammelgaard, P. Bøggild, I. Perch-Nielsen, J. Glückstad

    Research output: Chapter in Book/Report/Conference proceedingArticle in proceedingsResearchpeer-review

    Original languageEnglish
    Title of host publicationNanomanipulation with light 2
    EditorsD.L. Andrews
    Place of PublicationBellingham
    PublisherInternational Society for Optical Engineering
    Publication date2006
    Publication statusPublished - 2006
    EventPhotonics West 2006: Optoelectronics 2006 - San Jose, CA (US), 21-26 Jan
    Duration: 1 Jan 2006 → …


    ConferencePhotonics West 2006: Optoelectronics 2006
    CitySan Jose, CA (US), 21-26 Jan
    Period01/01/2006 → …
    SeriesSPIE Proceedings Series, 6131

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