Optically driven microtools fabricated by UV lithography and RIE

P.J. Rodrigo; L. Gammelgaard; P. Bøggild; I. Perch-Nielsen; J. Glückstad

doi:10.1117/12.646469

Optically driven microtools fabricated by UV lithography and RIE

P.J. Rodrigo, L. Gammelgaard, P. Bøggild, I. Perch-Nielsen, J. Glückstad

Research output: Chapter in Book/Report/Conference proceeding › Article in proceedings › Research › peer-review

Original language	English
Title of host publication	Nanomanipulation with light 2
Editors	D.L. Andrews
Place of Publication	Bellingham
Publisher	International Society for Optical Engineering
Publication date	2006
DOIs	https://doi.org/10.1117/12.646469
Publication status	Published - 2006
Event	Photonics West 2006: Optoelectronics 2006 - San Jose, CA (US), 21-26 Jan Duration: 1 Jan 2006 → …

Conference

Conference	Photonics West 2006: Optoelectronics 2006
City	San Jose, CA (US), 21-26 Jan
Period	01/01/2006 → …

Series	SPIE Proceedings Series, 6131

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10.1117/12.646469

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Cite this

@inproceedings{f35e64562bc74921b18113a674419cf6,

title = "Optically driven microtools fabricated by UV lithography and RIE",

keywords = "Diagnostik og behandling",

author = "P.J. Rodrigo and L. Gammelgaard and P. B{\o}ggild and I. Perch-Nielsen and J. Gl{\"u}ckstad",

year = "2006",

doi = "10.1117/12.646469",

language = "English",

series = "SPIE Proceedings Series, 6131",

editor = "D.L. Andrews",

booktitle = "Nanomanipulation with light 2",

publisher = "International Society for Optical Engineering",

note = "Photonics West 2006: Optoelectronics 2006 ; Conference date: 01-01-2006",

}

Rodrigo, PJ, Gammelgaard, L, Bøggild, P, Perch-Nielsen, I & Glückstad, J 2006, Optically driven microtools fabricated by UV lithography and RIE. in DL Andrews (ed.), Nanomanipulation with light 2. International Society for Optical Engineering, Bellingham, SPIE Proceedings Series, 6131, Photonics West 2006: Optoelectronics 2006, San Jose, CA (US), 21-26 Jan, 01/01/2006. https://doi.org/10.1117/12.646469

Optically driven microtools fabricated by UV lithography and RIE. / Rodrigo, P.J.; Gammelgaard, L.; Bøggild, P. et al.
Nanomanipulation with light 2. ed. / D.L. Andrews. Bellingham: International Society for Optical Engineering, 2006. (SPIE Proceedings Series, 6131).

Research output: Chapter in Book/Report/Conference proceeding › Article in proceedings › Research › peer-review

TY - GEN

T1 - Optically driven microtools fabricated by UV lithography and RIE

AU - Rodrigo, P.J.

AU - Gammelgaard, L.

AU - Bøggild, P.

AU - Perch-Nielsen, I.

AU - Glückstad, J.

PY - 2006

Y1 - 2006

KW - Diagnostik og behandling

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DO - 10.1117/12.646469

M3 - Article in proceedings

T3 - SPIE Proceedings Series, 6131

BT - Nanomanipulation with light 2

A2 - Andrews, D.L.

PB - International Society for Optical Engineering

CY - Bellingham

T2 - Photonics West 2006: Optoelectronics 2006

Y2 - 1 January 2006

ER -