Optically driven microtools fabricated by UV lithography and RIE

P.J. Rodrigo; L. Gammelgaard; P. Bøggild; I. Perch-Nielsen; J. Glückstad

doi:10.1117/12.646469

Optically driven microtools fabricated by UV lithography and RIE

P.J. Rodrigo, L. Gammelgaard, P. Bøggild, I. Perch-Nielsen, J. Glückstad

Research output: Chapter in Book/Report/Conference proceeding › Article in proceedings › Research › peer-review

Original language	English
Title of host publication	Nanomanipulation with light 2
Editors	D.L. Andrews
Place of Publication	Bellingham
Publisher	International Society for Optical Engineering
Publication date	2006
DOIs	https://doi.org/10.1117/12.646469
Publication status	Published - 2006
Event	SPIE Integrated Optoelectronic Devices 2006 - San Jose, United States Duration: 21 Jan 2009 → 26 Jan 2009

Conference

Conference	SPIE Integrated Optoelectronic Devices 2006
Country/Territory	United States
City	San Jose
Period	21/01/2009 → 26/01/2009

Series	SPIE Proceedings Series, 6131

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10.1117/12.646469

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Cite this

@inproceedings{f35e64562bc74921b18113a674419cf6,

title = "Optically driven microtools fabricated by UV lithography and RIE",

keywords = "Diagnostik og behandling",

author = "P.J. Rodrigo and L. Gammelgaard and P. B{\o}ggild and I. Perch-Nielsen and J. Gl{\"u}ckstad",

year = "2006",

doi = "10.1117/12.646469",

language = "English",

series = "SPIE Proceedings Series, 6131",

editor = "D.L. Andrews",

booktitle = "Nanomanipulation with light 2",

publisher = "International Society for Optical Engineering",

note = "SPIE Integrated Optoelectronic Devices 2006 ; Conference date: 21-01-2009 Through 26-01-2009",

}

Rodrigo, PJ, Gammelgaard, L, Bøggild, P, Perch-Nielsen, I & Glückstad, J 2006, Optically driven microtools fabricated by UV lithography and RIE. in DL Andrews (ed.), Nanomanipulation with light 2. International Society for Optical Engineering, Bellingham, SPIE Proceedings Series, 6131, SPIE Integrated Optoelectronic Devices 2006, San Jose, California, United States, 21/01/2009. https://doi.org/10.1117/12.646469

Optically driven microtools fabricated by UV lithography and RIE. / Rodrigo, P.J.; Gammelgaard, L.; Bøggild, P. et al.
Nanomanipulation with light 2. ed. / D.L. Andrews. Bellingham: International Society for Optical Engineering, 2006. (SPIE Proceedings Series, 6131).

Research output: Chapter in Book/Report/Conference proceeding › Article in proceedings › Research › peer-review

TY - GEN

T1 - Optically driven microtools fabricated by UV lithography and RIE

AU - Rodrigo, P.J.

AU - Gammelgaard, L.

AU - Bøggild, P.

AU - Perch-Nielsen, I.

AU - Glückstad, J.

PY - 2006

Y1 - 2006

KW - Diagnostik og behandling

U2 - 10.1117/12.646469

DO - 10.1117/12.646469

M3 - Article in proceedings

T3 - SPIE Proceedings Series, 6131

BT - Nanomanipulation with light 2

A2 - Andrews, D.L.

PB - International Society for Optical Engineering

CY - Bellingham

T2 - SPIE Integrated Optoelectronic Devices 2006

Y2 - 21 January 2009 through 26 January 2009

ER -