Optical micro-metrology of structured surfaces micro-machined by jet-ECM

Danilo Quagliotti; Guido Tosello; Aminul Islam; Hans Nørgaard Hansen; Henning Zeidler; André Martin; Andreas Schubert; Carla Brandao; Oltmann Riemer

Optical micro-metrology of structured surfaces micro-machined by jet-ECM

Danilo Quagliotti, Guido Tosello, Aminul Islam, Hans Nørgaard Hansen, Henning Zeidler, André Martin, Andreas Schubert, Carla Brandao, Oltmann Riemer

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Abstract

A procedure for statistical analysis and uncertainty evaluation is presented with regards to measurements of step height and surface texture. Measurements have been performed with a focus-variation microscope over jet electrochemical micro-machined surfaces. Traceability has been achieved using as reference contact measurements from a calibrated stylus instrument. A statistical analysis has been carried out and the method of least squares has been implemented to correct for systematic behaviours. The combined uncertainty has been evaluated accordingly and the expanded uncertainty has been finally calculated as the confidence interval of 95 %. Results show that agreement within single digit micrometre (dimensional measurements) and tenths of micrometre (surface parameters measurements) can be achieved with the proposed methodology.

Original language	English
Publication date	2015
Number of pages	1
Publication status	Published - 2015
Event	15th International Conference of the European Society for Precision Engineering and Nanotechnology - Universiteitshal, Leuven, Belgium Duration: 1 Jun 2015 → 5 Jun 2015

Conference

Conference	15th International Conference of the European Society for Precision Engineering and Nanotechnology
Location	Universiteitshal
Country/Territory	Belgium
City	Leuven
Period	01/06/2015 → 05/06/2015

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HiMicro: High Precision Micro Production Technologies
Tosello, G. (Project Participant), Islam, A. (Project Participant), Marhöfer, D. M. (Project Participant), Quagliotti, D. (Project Participant) & Giannekas, N. (Project Participant)
30/10/2012 → 30/11/2015
Project: Research

Cite this

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title = "Optical micro-metrology of structured surfaces micro-machined by jet-ECM",

abstract = "A procedure for statistical analysis and uncertainty evaluation is presented with regards to measurements of step height and surface texture. Measurements have been performed with a focus-variation microscope over jet electrochemical micro-machined surfaces. Traceability has been achieved using as reference contact measurements from a calibrated stylus instrument. A statistical analysis has been carried out and the method of least squares has been implemented to correct for systematic behaviours. The combined uncertainty has been evaluated accordingly and the expanded uncertainty has been finally calculated as the confidence interval of 95 \%. Results show that agreement within single digit micrometre (dimensional measurements) and tenths of micrometre (surface parameters measurements) can be achieved with the proposed methodology.",

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T1 - Optical micro-metrology of structured surfaces micro-machined by jet-ECM

AU - Quagliotti, Danilo

AU - Tosello, Guido

AU - Islam, Aminul

AU - Hansen, Hans Nørgaard

AU - Zeidler, Henning

AU - Martin, André

AU - Schubert, Andreas

AU - Brandao, Carla

AU - Riemer, Oltmann

PY - 2015

Y1 - 2015

N2 - A procedure for statistical analysis and uncertainty evaluation is presented with regards to measurements of step height and surface texture. Measurements have been performed with a focus-variation microscope over jet electrochemical micro-machined surfaces. Traceability has been achieved using as reference contact measurements from a calibrated stylus instrument. A statistical analysis has been carried out and the method of least squares has been implemented to correct for systematic behaviours. The combined uncertainty has been evaluated accordingly and the expanded uncertainty has been finally calculated as the confidence interval of 95 %. Results show that agreement within single digit micrometre (dimensional measurements) and tenths of micrometre (surface parameters measurements) can be achieved with the proposed methodology.

AB - A procedure for statistical analysis and uncertainty evaluation is presented with regards to measurements of step height and surface texture. Measurements have been performed with a focus-variation microscope over jet electrochemical micro-machined surfaces. Traceability has been achieved using as reference contact measurements from a calibrated stylus instrument. A statistical analysis has been carried out and the method of least squares has been implemented to correct for systematic behaviours. The combined uncertainty has been evaluated accordingly and the expanded uncertainty has been finally calculated as the confidence interval of 95 %. Results show that agreement within single digit micrometre (dimensional measurements) and tenths of micrometre (surface parameters measurements) can be achieved with the proposed methodology.

M3 - Poster

T2 - 15th International Conference of the European Society for Precision Engineering and Nanotechnology

Y2 - 1 June 2015 through 5 June 2015

ER -

Optical micro-metrology of structured surfaces micro-machined by jet-ECM

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HiMicro: High Precision Micro Production Technologies

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