Optical micro-metrology of structured surfaces micro-machined by jet-ECM

Danilo Quagliotti, Guido Tosello, Aminul Islam, Hans Nørgaard Hansen, Henning Zeidler, André Martin, Andreas Schubert, Carla Brandao, Oltmann Riemer

Research output: Chapter in Book/Report/Conference proceedingArticle in proceedingsResearchpeer-review

Abstract

A procedure for statistical analysis and uncertainty evaluation is presented with regards to measurements of step height and surface texture. Measurements have been performed with a focus-variation microscope over jet electrochemical micro-machined surfaces. Traceability has been achieved using as reference contact measurements from a calibrated stylus instrument. A statistical analysis has been carried out and the method of least squares has been implemented to correct for systematic behaviours. The combined uncertainty has been evaluated accordingly and the expanded uncertainty has been finally calculated as the confidence interval of 95 %. Results show that agreement within single digit micrometre (dimensional measurements) and tenths of micrometre (surface parameters measurements) can be achieved with the proposed methodology
Original languageEnglish
Title of host publicationProceedings of the 15th International Conference of the european Society for Precision Engineering and Nanotechnology
Number of pages2
Publication date2015
Publication statusPublished - 2015
Event15th International Conference of the European Society for Precision Engineering and Nanotechnology - Universiteitshal, Leuven, Belgium
Duration: 1 Jun 20155 Jun 2015

Conference

Conference15th International Conference of the European Society for Precision Engineering and Nanotechnology
LocationUniversiteitshal
CountryBelgium
CityLeuven
Period01/06/201505/06/2015

Keywords

  • Step height
  • Roughness
  • Micro-machining
  • Uncertainty
  • ISO GUM

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