Optical micro-metrology of structured surfaces micro-machined by jet-ECM

Danilo Quagliotti, Guido Tosello, Aminul Islam, Hans Nørgaard Hansen, Henning Zeidler, André Martin, Andreas Schubert, Carla Brandao, Oltmann Riemer

    Research output: Contribution to conferencePosterResearchpeer-review

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    Abstract

    A procedure for statistical analysis and uncertainty evaluation is presented with regards to measurements of step height and surface texture. Measurements have been performed with a focus-variation microscope over jet electrochemical micro-machined surfaces. Traceability has been achieved using as reference contact measurements from a calibrated stylus instrument. A statistical analysis has been carried out and the method of least squares has been implemented to correct for systematic behaviours. The combined uncertainty has been evaluated accordingly and the expanded uncertainty has been finally calculated as the confidence interval of 95 %. Results show that agreement within single digit micrometre (dimensional measurements) and tenths of micrometre (surface parameters measurements) can be achieved with the proposed methodology.
    Original languageEnglish
    Publication date2015
    Number of pages1
    Publication statusPublished - 2015
    Event15th International Conference of the European Society for Precision Engineering and Nanotechnology - Universiteitshal, Leuven, Belgium
    Duration: 1 Jun 20155 Jun 2015

    Conference

    Conference15th International Conference of the European Society for Precision Engineering and Nanotechnology
    LocationUniversiteitshal
    Country/TerritoryBelgium
    CityLeuven
    Period01/06/201505/06/2015

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