Optical loss analysis of silicon rich nitride waveguides

Hans Mertens, Karin Nordström Andersen, Winnie Edith Svendsen

    Research output: Chapter in Book/Report/Conference proceedingArticle in proceedingsResearchpeer-review

    288 Downloads (Orbit)

    Abstract

    An analysis of the propagation loss in high-index LPCVD-grown silicon rich nitride (SRN) slab waveguides and channel waveguides is presented. A propagation loss as low as 0.6 dB/cm has been achieved.
    Original languageEnglish
    Title of host publicationECOC
    Volume3
    PublisherIEEE
    Publication date2002
    Pages1-2
    ISBN (Print)87-90974-63-8
    Publication statusPublished - 2002
    Event28th European Conference on Optical Communication - Copenhagen, Denmark
    Duration: 8 Sept 200212 Sept 2002
    Conference number: 28
    http://ieeexplore.ieee.org/xpl/mostRecentIssue.jsp?punumber=10668

    Conference

    Conference28th European Conference on Optical Communication
    Number28
    Country/TerritoryDenmark
    CityCopenhagen
    Period08/09/200212/09/2002
    Internet address

    Bibliographical note

    Copyright: 2002 IEEE. Personal use of this material is permitted. However, permission to reprint/republish this material for advertising or promotional purposes or for creating new collective works for resale or redistribution to servers or lists, or to reuse any copyrighted component of this work in other works must be obtained from the IEEE

    Fingerprint

    Dive into the research topics of 'Optical loss analysis of silicon rich nitride waveguides'. Together they form a unique fingerprint.

    Cite this