Optical constants of magnetron sputtered Pt thin films with improved accuracy in the N- and O-electronic shell absorption regions

Regina Soufli, Franck Delmotte, Julia Meyer-Ilse, Farhad Salmassi, Nicolai Brejnholt, Sonny Massahi, David Girou, Finn Christensen, Eric M. Gullikson

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    Abstract

    We present an experimental, self-consistent determination of the optical constants (refractive index) of Pt using a combination of photoabsorption and reflectance data in the photon energy range 25–778 eV, which includes the N- and O-shell electronic absorption edges of Pt. We compare our new experimental values with Pt optical constant data sets from the literature. Our Pt optical constant values reveal highly resolved absorption-edge fine structure around the O2,3 and N6,7 edges in both the absorptive and dispersive portions of the refractive index, which were missing in the earlier literature.
    Original languageEnglish
    Article number085106
    JournalJournal of Applied Physics
    Volume125
    Issue number8
    ISSN0021-8979
    DOIs
    Publication statusPublished - 2019

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