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Optical characterization of low-temperature grown GaAs by transmission measurements above the band gap

  • D. Streb
  • , M. Ruff
  • , S. U. Dankowski
  • , P. Kiesel
  • , M. Kneissl
  • , S. Malzer
  • , Ulrich Dieter Felix Keil
  • , G. H. Döhler

    Research output: Contribution to journalJournal articleResearchpeer-review

    Abstract

    We report on transmission measurements on low temperature grown GaAs and standard GaAs for a spectral range 0.8-2.8 eV. We measured a drastic reduction of absorption due to annealing over the whole spectral range. The absorption changes depend on the annealing temperature and occur in two individual phases. Additional transmission measurements on samples without antireflection coating confirm our earlier results of an annealing induced refractive index change of Δn≈0.2.
    Original languageEnglish
    JournalJournal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures
    Volume14
    Issue number3
    Pages (from-to)2275-2277
    ISSN1071-1023
    DOIs
    Publication statusPublished - 1996

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