Optical characterisation of photonic wire and photonic crystal waveguides fabricated using nanoimprint lithography

Peter Ingo Borel, Lars Hagedorn Frandsen, Andrei Lavrinenko, Brian Bilenberg Olsen, Theodor Nielsen, Anders Kristensen, Jakob Søndergaard Jensen, Ole Sigmund

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Abstract

We have characterised photonic-crystal and photonic-wire waveguides fabricated by thermal nanoimprint lithography. The structures, with feature sizes down below 20 nm, are benchmarked against similar structures defined by direct electron beam lithography.
Original languageEnglish
Title of host publicationProceedings European Conference on Optical Communication
VolumeCD-ROM
PublisherIEEE
Publication date2006
PagesWe1.2.4
ISBN (Print)978-2-912328-39-7
DOIs
Publication statusPublished - 2006
Event32nd European Conference on Optical Communications - Cannes, France
Duration: 24 Sep 200628 Sep 2006
Conference number: 32
http://ieeexplore.ieee.org/xpl/mostRecentIssue.jsp?punumber=4786610

Conference

Conference32nd European Conference on Optical Communications
Number32
CountryFrance
CityCannes
Period24/09/200628/09/2006
Internet address

Bibliographical note

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Cite this

Borel, P. I., Frandsen, L. H., Lavrinenko, A., Olsen, B. B., Nielsen, T., Kristensen, A., Jensen, J. S., & Sigmund, O. (2006). Optical characterisation of photonic wire and photonic crystal waveguides fabricated using nanoimprint lithography. In Proceedings European Conference on Optical Communication (Vol. CD-ROM, pp. We1.2.4). IEEE. https://doi.org/10.1109/ECOC.2006.4801135