Optical characterisation of photonic wire and photonic crystal waveguides fabricated using nanoimprint lithography

Peter Ingo Borel; Lars Hagedorn Frandsen; Andrei Lavrinenko; Brian Bilenberg Olsen; Theodor Nielsen; Anders Kristensen; Jakob Søndergaard Jensen; Ole Sigmund

doi:10.1109/ECOC.2006.4801135

Optical characterisation of photonic wire and photonic crystal waveguides fabricated using nanoimprint lithography

Peter Ingo Borel, Lars Hagedorn Frandsen, Andrei Lavrinenko, Brian Bilenberg Olsen, Theodor Nielsen, Anders Kristensen, Jakob Søndergaard Jensen, Ole Sigmund

Center for Nanoteknologi

Research output: Chapter in Book/Report/Conference proceeding › Article in proceedings › Research › peer-review

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Abstract

We have characterised photonic-crystal and photonic-wire waveguides fabricated by thermal nanoimprint lithography. The structures, with feature sizes down below 20 nm, are benchmarked against similar structures defined by direct electron beam lithography.

Original language	English
Title of host publication	Proceedings European Conference on Optical Communication
Volume	CD-ROM
Publisher	IEEE
Publication date	2006
Pages	We1.2.4
ISBN (Print)	978-2-912328-39-7
DOIs	https://doi.org/10.1109/ECOC.2006.4801135
Publication status	Published - 2006
Event	32nd European Conference on Optical Communications - Cannes, France Duration: 24 Sept 2006 → 28 Sept 2006 Conference number: 32 http://ieeexplore.ieee.org/xpl/mostRecentIssue.jsp?punumber=4786610

Conference

Conference	32nd European Conference on Optical Communications
Number	32
Country/Territory	France
City	Cannes
Period	24/09/2006 → 28/09/2006
Internet address	http://ieeexplore.ieee.org/xpl/mostRecentIssue.jsp?punumber=4786610

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Copyright: 2006 IEEE. Personal use of this material is permitted. However, permission to reprint/republish this material for advertising or promotional purposes or for creating new collective works for resale or redistribution to servers or lists, or to reuse any copyrighted component of this work in other works must be obtained from the IEEE

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Borel, P. I., Frandsen, L. H., Lavrinenko, A., Olsen, B. B., Nielsen, T., Kristensen, A., Jensen, J. S., & Sigmund, O. (2006). Optical characterisation of photonic wire and photonic crystal waveguides fabricated using nanoimprint lithography. In Proceedings European Conference on Optical Communication (Vol. CD-ROM, pp. We1.2.4). IEEE. https://doi.org/10.1109/ECOC.2006.4801135

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title = "Optical characterisation of photonic wire and photonic crystal waveguides fabricated using nanoimprint lithography",

abstract = "We have characterised photonic-crystal and photonic-wire waveguides fabricated by thermal nanoimprint lithography. The structures, with feature sizes down below 20 nm, are benchmarked against similar structures defined by direct electron beam lithography.",

author = "Borel, {Peter Ingo} and Frandsen, {Lars Hagedorn} and Andrei Lavrinenko and Olsen, {Brian Bilenberg} and Theodor Nielsen and Anders Kristensen and Jensen, {Jakob S{\o}ndergaard} and Ole Sigmund",

note = "Copyright: 2006 IEEE. Personal use of this material is permitted. However, permission to reprint/republish this material for advertising or promotional purposes or for creating new collective works for resale or redistribution to servers or lists, or to reuse any copyrighted component of this work in other works must be obtained from the IEEE; 32nd European Conference on Optical Communications, ECOC 2006 ; Conference date: 24-09-2006 Through 28-09-2006",

year = "2006",

doi = "10.1109/ECOC.2006.4801135",

language = "English",

isbn = "978-2-912328-39-7",

volume = "CD-ROM",

pages = "We1.2.4",

booktitle = "Proceedings European Conference on Optical Communication",

publisher = "IEEE",

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url = "http://ieeexplore.ieee.org/xpl/mostRecentIssue.jsp?punumber=4786610",

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Borel, PI, Frandsen, LH, Lavrinenko, A, Olsen, BB, Nielsen, T, Kristensen, A, Jensen, JS & Sigmund, O 2006, Optical characterisation of photonic wire and photonic crystal waveguides fabricated using nanoimprint lithography. in Proceedings European Conference on Optical Communication. vol. CD-ROM, IEEE, pp. We1.2.4, 32nd European Conference on Optical Communications, Cannes, France, 24/09/2006. https://doi.org/10.1109/ECOC.2006.4801135

Optical characterisation of photonic wire and photonic crystal waveguides fabricated using nanoimprint lithography. / Borel, Peter Ingo; Frandsen, Lars Hagedorn; Lavrinenko, Andrei et al.
Proceedings European Conference on Optical Communication. Vol. CD-ROM IEEE, 2006. p. We1.2.4.

Research output: Chapter in Book/Report/Conference proceeding › Article in proceedings › Research › peer-review

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T1 - Optical characterisation of photonic wire and photonic crystal waveguides fabricated using nanoimprint lithography

AU - Borel, Peter Ingo

AU - Frandsen, Lars Hagedorn

AU - Lavrinenko, Andrei

AU - Olsen, Brian Bilenberg

AU - Nielsen, Theodor

AU - Kristensen, Anders

AU - Jensen, Jakob Søndergaard

AU - Sigmund, Ole

N1 - Conference code: 32

PY - 2006

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N2 - We have characterised photonic-crystal and photonic-wire waveguides fabricated by thermal nanoimprint lithography. The structures, with feature sizes down below 20 nm, are benchmarked against similar structures defined by direct electron beam lithography.

AB - We have characterised photonic-crystal and photonic-wire waveguides fabricated by thermal nanoimprint lithography. The structures, with feature sizes down below 20 nm, are benchmarked against similar structures defined by direct electron beam lithography.

U2 - 10.1109/ECOC.2006.4801135

DO - 10.1109/ECOC.2006.4801135

M3 - Article in proceedings

SN - 978-2-912328-39-7

VL - CD-ROM

SP - We1.2.4

BT - Proceedings European Conference on Optical Communication

PB - IEEE

T2 - 32nd European Conference on Optical Communications

Y2 - 24 September 2006 through 28 September 2006

ER -

Optical characterisation of photonic wire and photonic crystal waveguides fabricated using nanoimprint lithography

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