One-step Maskless Fabrication and Optical Characterization of Silicon Surfaces with Antireflective Properties and a White Color Appearance

Ling Sun, Nikolaj Agentoft Feidenhans'l, Agnieszka Telecka, Rafael J. Taboryski

    Research output: Contribution to journalJournal articleResearchpeer-review

    204 Downloads (Pure)

    Abstract

    We report a simple one-step maskless fabrication of inverted pyramids on silicon wafers by reactive ion etching. The fabricated surface structures exhibit excellent anti-reflective properties: The total reflectance of the nano inverted pyramids fabricated by our method can be as low as 12% without any anti-reflective layers, and down to only 0.33% with a silicon nitride coating. The results from angle resolved scattering measurements indicate that the existence of triple reflections is responsible for the reduced reflectance. The surfaces with the nano inverted pyramids also exhibit a distinct milky white color.
    Original languageEnglish
    Article number35183
    JournalScientific Reports
    Volume6
    Number of pages6
    ISSN2045-2322
    DOIs
    Publication statusPublished - 2016

    Cite this

    @article{39ac3f1c85c2436ea67b46c17c96e784,
    title = "One-step Maskless Fabrication and Optical Characterization of Silicon Surfaces with Antireflective Properties and a White Color Appearance",
    abstract = "We report a simple one-step maskless fabrication of inverted pyramids on silicon wafers by reactive ion etching. The fabricated surface structures exhibit excellent anti-reflective properties: The total reflectance of the nano inverted pyramids fabricated by our method can be as low as 12{\%} without any anti-reflective layers, and down to only 0.33{\%} with a silicon nitride coating. The results from angle resolved scattering measurements indicate that the existence of triple reflections is responsible for the reduced reflectance. The surfaces with the nano inverted pyramids also exhibit a distinct milky white color.",
    author = "Ling Sun and Feidenhans'l, {Nikolaj Agentoft} and Agnieszka Telecka and Taboryski, {Rafael J.}",
    year = "2016",
    doi = "10.1038/srep35183",
    language = "English",
    volume = "6",
    journal = "Scientific Reports",
    issn = "2045-2322",
    publisher = "Nature Publishing Group",

    }

    One-step Maskless Fabrication and Optical Characterization of Silicon Surfaces with Antireflective Properties and a White Color Appearance. / Sun, Ling; Feidenhans'l, Nikolaj Agentoft; Telecka, Agnieszka; Taboryski, Rafael J.

    In: Scientific Reports, Vol. 6, 35183, 2016.

    Research output: Contribution to journalJournal articleResearchpeer-review

    TY - JOUR

    T1 - One-step Maskless Fabrication and Optical Characterization of Silicon Surfaces with Antireflective Properties and a White Color Appearance

    AU - Sun, Ling

    AU - Feidenhans'l, Nikolaj Agentoft

    AU - Telecka, Agnieszka

    AU - Taboryski, Rafael J.

    PY - 2016

    Y1 - 2016

    N2 - We report a simple one-step maskless fabrication of inverted pyramids on silicon wafers by reactive ion etching. The fabricated surface structures exhibit excellent anti-reflective properties: The total reflectance of the nano inverted pyramids fabricated by our method can be as low as 12% without any anti-reflective layers, and down to only 0.33% with a silicon nitride coating. The results from angle resolved scattering measurements indicate that the existence of triple reflections is responsible for the reduced reflectance. The surfaces with the nano inverted pyramids also exhibit a distinct milky white color.

    AB - We report a simple one-step maskless fabrication of inverted pyramids on silicon wafers by reactive ion etching. The fabricated surface structures exhibit excellent anti-reflective properties: The total reflectance of the nano inverted pyramids fabricated by our method can be as low as 12% without any anti-reflective layers, and down to only 0.33% with a silicon nitride coating. The results from angle resolved scattering measurements indicate that the existence of triple reflections is responsible for the reduced reflectance. The surfaces with the nano inverted pyramids also exhibit a distinct milky white color.

    U2 - 10.1038/srep35183

    DO - 10.1038/srep35183

    M3 - Journal article

    VL - 6

    JO - Scientific Reports

    JF - Scientific Reports

    SN - 2045-2322

    M1 - 35183

    ER -