On the surface condition of Langmuir probes in reactive plasmas

Eugen Stamate; K. Ohe

doi:10.1063/1.1338489

On the surface condition of Langmuir probes in reactive plasmas

Eugen Stamate
, K. Ohe

Nagoya Institute of Technology

Research output: Contribution to journal › Journal article › Research › peer-review

Abstract

The edge effect of a planar probe induces an elliptic-like sheath structure that acts as an electrostatic lens, which then focuses the charged particles on distinct regions of the probe surface. Positive-ion
sputtering, chemical adsorption, and/or plasma deposition divide the probe surface into distinct regions with different work functions, which cause a double-hump structure ~DHS! in the second
derivative of the probe current. Thus, the DHS cannot be correlated with a distinct group of charged particles. © 2001 American Institute of Physics.

Original language	English
Journal	Applied Physics Letters
Volume	78
Issue number	2
Pages (from-to)	153-155
ISSN	0003-6951
DOIs	https://doi.org/10.1063/1.1338489
Publication status	Published - 2001
Externally published	Yes

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title = "On the surface condition of Langmuir probes in reactive plasmas",

abstract = "The edge effect of a planar probe induces an elliptic-like sheath structure that acts as an electrostatic lens, which then focuses the charged particles on distinct regions of the probe surface. Positive-ion sputtering, chemical adsorption, and/or plasma deposition divide the probe surface into distinct regions with different work functions, which cause a double-hump structure \textasciitilde{}DHS! in the second derivative of the probe current. Thus, the DHS cannot be correlated with a distinct group of charged particles. {\textcopyright} 2001 American Institute of Physics.",

author = "Eugen Stamate and K. Ohe",

year = "2001",

doi = "10.1063/1.1338489",

language = "English",

volume = "78",

pages = "153--155",

journal = "Applied Physics Letters",

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publisher = "American Institute of Physics",

number = "2",

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T1 - On the surface condition of Langmuir probes in reactive plasmas

AU - Stamate, Eugen

AU - Ohe, K.

PY - 2001

Y1 - 2001

N2 - The edge effect of a planar probe induces an elliptic-like sheath structure that acts as an electrostatic lens, which then focuses the charged particles on distinct regions of the probe surface. Positive-ion sputtering, chemical adsorption, and/or plasma deposition divide the probe surface into distinct regions with different work functions, which cause a double-hump structure ~DHS! in the second derivative of the probe current. Thus, the DHS cannot be correlated with a distinct group of charged particles. © 2001 American Institute of Physics.

AB - The edge effect of a planar probe induces an elliptic-like sheath structure that acts as an electrostatic lens, which then focuses the charged particles on distinct regions of the probe surface. Positive-ion sputtering, chemical adsorption, and/or plasma deposition divide the probe surface into distinct regions with different work functions, which cause a double-hump structure ~DHS! in the second derivative of the probe current. Thus, the DHS cannot be correlated with a distinct group of charged particles. © 2001 American Institute of Physics.

U2 - 10.1063/1.1338489

DO - 10.1063/1.1338489

M3 - Journal article

SN - 0003-6951

VL - 78

SP - 153

EP - 155

JO - Applied Physics Letters

JF - Applied Physics Letters

IS - 2

ER -

On the surface condition of Langmuir probes in reactive plasmas

Abstract

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