On the surface condition of Langmuir probes in reactive plasmas

Research output: Contribution to journalJournal articleResearchpeer-review


The edge effect of a planar probe induces an elliptic-like sheath structure that acts as an electrostatic lens, which then focuses the charged particles on distinct regions of the probe surface. Positive-ion
sputtering, chemical adsorption, and/or plasma deposition divide the probe surface into distinct regions with different work functions, which cause a double-hump structure ~DHS! in the second
derivative of the probe current. Thus, the DHS cannot be correlated with a distinct group of charged particles. © 2001 American Institute of Physics.
Original languageEnglish
JournalApplied Physics Letters
Issue number2
Pages (from-to)153-155
Publication statusPublished - 2001
Externally publishedYes


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