Abstract
The edge effect of a planar probe induces an elliptic-like sheath structure that acts as an electrostatic lens, which then focuses the charged particles on distinct regions of the probe surface. Positive-ion
sputtering, chemical adsorption, and/or plasma deposition divide the probe surface into distinct regions with different work functions, which cause a double-hump structure ~DHS! in the second
derivative of the probe current. Thus, the DHS cannot be correlated with a distinct group of charged particles. © 2001 American Institute of Physics.
sputtering, chemical adsorption, and/or plasma deposition divide the probe surface into distinct regions with different work functions, which cause a double-hump structure ~DHS! in the second
derivative of the probe current. Thus, the DHS cannot be correlated with a distinct group of charged particles. © 2001 American Institute of Physics.
Original language | English |
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Journal | Applied Physics Letters |
Volume | 78 |
Issue number | 2 |
Pages (from-to) | 153-155 |
ISSN | 0003-6951 |
DOIs | |
Publication status | Published - 2001 |
Externally published | Yes |