On the formation of Black Silicon in SF6-O2 plasma: The CORE sequence and BSi on Demand

On the formation of Black Silicon in SF₆-O₂ plasma: The CORE sequence and BSi on Demand

Research output: Non-textual form › Sound/Visual production (digital) › Research › peer-review

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Original language	English
Publication date	2019
Media of output	Power Point Presentation
Size	12 slides
Publication status	Published - 2019
Event	45th International conference on Micro and Nano Engineering - Rhodes, Greece Duration: 23 Sep 2019 → 26 May 2021

Conference	45th International conference on Micro and Nano Engineering
Country	Greece
City	Rhodes
Period	23/09/2019 → 26/05/2021