On the flow behavior of diffuser/nozzle elements microfabricated in silicon

Matthias Heschel, S. Svanebjerg, Matthias Mullenborn, Siebe Bouwstra

    Research output: Chapter in Book/Report/Conference proceedingBook chapterResearchpeer-review

    Original languageEnglish
    Title of host publicationMSW'96: Proc. of the 2nd. Micro Structure Workshop
    Publication date1996
    Publication statusPublished - 1996
    Event2nd Micro Structure Workshop - Uppsala, Sweden
    Duration: 26 Mar 199627 Mar 1996
    Conference number: 2

    Workshop

    Workshop2nd Micro Structure Workshop
    Number2
    CountrySweden
    CityUppsala
    Period26/03/199627/03/1996

    Cite this