Objectives comparison in a confocal microscope using pseuso-random roughness artefacts

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Abstract

The increasing importance of optical microscopy in the geometrical and dimensional assessment of structured and freeform surfaces has easily overcome many difficulties related to the use of contact instruments. Nonetheless, some concerns related to optical instruments when measuring such surfaces are still open. The working distance (WD) of some standard (ST) lenses, e.g., can prevent from freely moving alongside features at different heights and positions of structured and freeform shapes due to the risk of collisions. In such cases, the so-called long working distance (LWD) objectives allow to operate at a longer distance from the surface under measurement, saving the same field of view (FoV) but accepting lower numerical apertures.
Original languageEnglish
Publication date2016
Number of pages2
Publication statusPublished - 2016
EventSpecial Interest Group Meeting: Structured & Freeform Surfaces 9th – 10th November 2016 - Technical University of Denmark (DTU) Copenhagen, DK -
Duration: 9 Nov 201610 Nov 2016

Conference

ConferenceSpecial Interest Group Meeting: Structured & Freeform Surfaces 9th – 10th November 2016 - Technical University of Denmark (DTU) Copenhagen, DK
Period09/11/201610/11/2016

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