Nucleation of damage centres during ion implantation of silicon

L.T. Chadderton

    Research output: Book/ReportReport

    Original languageEnglish
    Number of pages25
    Publication statusPublished - 1970
    SeriesDenmark. Forskningscenter Risoe. Risoe-R
    Number236
    ISSN0106-2840

    Keywords

    • Risø-R-236
    • Risø-236
    • Risø report 236

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