Novel resonant cantilever mass change detection and resonant frequency tuning.

Alexander Grigorov, Anja Boisen

    Research output: Contribution to journalJournal articleResearchpeer-review

    Abstract

    This paper reports a novel way to detect the resonant frequency of an electro-thermally actuated cantilever sensor that we have previously reported, in order to perform mass detection by resonant frequency shift detection. The device is based on monitoring the rupture of a clamped cantilever structure due to mass changes. Thus the device can only be used once and is best suited for qualitative mass detection. At the same time, the resonant frequency of the device can be tuned by the input signal power. This allows scanning power instead of frequency, and simplifies device operation and accompanying electronics.
    Original languageEnglish
    JournalMicroelectronic Engineering
    Volume78-79
    Pages (from-to)190-194
    ISSN0167-9317
    DOIs
    Publication statusPublished - 2005

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