Novel Designs for Application Specific MEMS Pressure Sensors

Giulio Fragiacomo, Kasper Reck, Lasse Vestergaard Lorenzen, Erik Vilain Thomsen

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    Abstract

    In the framework of developing innovative microfabricated pressure sensors, we present here three designs based on different readout principles, each one tailored for a specific application. A touch mode capacitive pressure sensor with high sensitivity (14 pF/bar), low temperature dependence and high capacitive output signal (more than 100 pF) is depicted. An optical pressure sensor intrinsically immune to electromagnetic interference, with large pressure range (0-350 bar) and a sensitivity of 1 pm/bar is presented. Finally, a resonating wireless pressure sensor power source free with a sensitivity of 650 KHz/mmHg is described. These sensors will be related with their applications in harsh environment, distributed systems and medical environment, respectively. For many aspects, commercially available sensors, which in vast majority are piezoresistive, are not suited for the applications proposed.
    Original languageEnglish
    JournalSensors
    Volume10
    Issue number11
    Pages (from-to)9541-9563
    ISSN1424-8220
    DOIs
    Publication statusPublished - 2010

    Bibliographical note

    This article is an open access article distributed under the terms and conditions of the Creative Commons Attribution license (http://creativecommons.org/licenses/by/3.0/.)

    Keywords

    • optical
    • wireless
    • capacitive
    • pressure
    • MEMS
    • MOEMS
    • micromachined
    • silicon

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