Abstract
This paper presents a novel clocking scheme for the Favrat charge pump topology. The proposed clock scheme achieves an 8 % higher maximum power output and a 12 % higher maximum output voltage than the prior-art clock scheme. The novel clock scheme is part of the development of a very high voltage charge pump for MEMS applications. In this work a 46-stage charge pump based on the Favrat charge pump topology has been fabricated in a 180-nm SOI process with a > 200 V breakdown voltage. With an input voltage of 5 V the fabricated charge pump reach an output voltage of 185 V when driven by the proposed clock scheme and loaded with a 2 nA load, the prior-art clock scheme can only reach an output voltage of 165 V with a 2 nA load.
Original language | English |
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Title of host publication | Proceedings of 2019 IEEE Nordic Circuits and Systems Conference |
Number of pages | 7 |
Publisher | IEEE |
Publication date | 2019 |
Article number | 8906942 |
ISBN (Print) | 9781728127699 |
DOIs | |
Publication status | Published - 2019 |
Event | 2019 IEEE Nordic Circuits and Systems Conference - Helsinki, Finland Duration: 29 Oct 2019 → 30 Oct 2019 https://events.tuni.fi/norcas2019/ |
Conference
Conference | 2019 IEEE Nordic Circuits and Systems Conference |
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Country | Finland |
City | Helsinki |
Period | 29/10/2019 → 30/10/2019 |
Internet address |