Note: Optical fiber milled by focused ion beam and its application for Fabry-Pérot refractive index sensor

Scott Wu Yuan, Fei Wang, Alexey Savenko, Dirch Hjorth Petersen, Ole Bang

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Abstract

We introduce a highly compact fiber-optic Fabry-Pérot refractive index sensor integrated with a fluid channel that is fabricated directly near the tip of a 32 μm in diameter single-mode fiber taper. The focused ion beam technique is used to efficiently mill the microcavity from the fiber side and finely polish the end facets of the cavity with a high spatial resolution. It is found that a fringe visibility of over 15 dB can be achieved and that the sensor has a sensitivity of ∼1731 nm/RIU (refractive index units) and a detection limit of ∼5.78 × 10−6 RIU. This miniature integrated all-in-fiber optofludic sensor may find use in minimal-invasive biomedical applications.
Original languageEnglish
JournalReview of Scientific Instruments
Volume82
Issue number7
Pages (from-to)076103
ISSN0034-6748
DOIs
Publication statusPublished - 2011

Bibliographical note

Copyright (2011) American Institute of Physics (AIP).

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