Original language | English |
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Title of host publication | Nordic Collaboration in Micromachine Technologies. |
Publisher | Micromachine Center, Japan |
Publication date | 1999 |
Pages | 63-68 |
Publication status | Published - 1999 |
Event | 5th International Micromachine Symposium - Tokyo, Japan Duration: 28 Oct 1999 → 29 Oct 1999 |
Conference
Conference | 5th International Micromachine Symposium |
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Country/Territory | Japan |
City | Tokyo |
Period | 28/10/1999 → 29/10/1999 |