Nonuniform ion bombardment on substrate caused by ion focusing effect

Research output: Chapter in Book/Report/Conference proceeding › Article in proceedings › Research › peer-review

Original language	English
Title of host publication	Proceedings of 25th International Symposium on Dry Process (DPS)
Number of pages	4
Publication date	2003
Pages	201-204
Publication status	Published - 2003
Externally published	Yes
Event	25th International Symposium on Dry Process (DPS) - Tokyo, Japan Duration: 13 Nov 2003 → 14 Nov 2003

Conference	25th International Symposium on Dry Process (DPS)
Country/Territory	Japan
City	Tokyo
Period	13/11/2003 → 14/11/2003

OpenUrl availability

@inproceedings{ac00202bc5824de5afaca7557591f0a3,

title = "Nonuniform ion bombardment on substrate caused by ion focusing effect",

author = "Eugen Stamate and H. Sugai",

year = "2003",

language = "English",

pages = "201--204",

booktitle = "Proceedings of 25th International Symposium on Dry Process (DPS)",

note = "25th International Symposium on Dry Process (DPS) ; Conference date: 13-11-2003 Through 14-11-2003",

}