Nonuniform ion bombardment on substrate caused by ion focusing effect

Eugen Stamate, H. Sugai

Research output: Chapter in Book/Report/Conference proceedingArticle in proceedingsResearchpeer-review

Original languageEnglish
Title of host publicationProceedings of 25th International Symposium on Dry Process (DPS)
Number of pages4
Publication date2003
Pages201-204
Publication statusPublished - 2003
Externally publishedYes
Event25th International Symposium on Dry Process (DPS) - Tokyo, Japan
Duration: 1 Jan 2003 → …

Conference

Conference25th International Symposium on Dry Process (DPS)
CountryJapan
CityTokyo
Period01/01/2003 → …

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