Nonlinear electromagnetic fields in 0.5 MHz inductively coupled plasmas

Radial profiles of magnetic fields in the electrostatic (E) and electromagnetic (H) modes of low-frequency (similar to500 kHz) inductively coupled plasmas have been measured using miniature magnetic probes. In the low-power (similar to170 W) E-mode, the magnetic field pattern is purely linear, with the fundamental frequency harmonics only. After transition to higher-power (similar to1130 W) H-mode, the second-harmonic nonlinear azimuthal magnetic field B-phi(2omega) that is in 4-6 times larger than the fundamental frequency component B-phi(omega), has been observed. A simplified plasma fluid model explaining the generation of the second harmonics of the azimuthal magnetic field in the plasma source is proposed. The nonlinear second harmonic poloidal (r-z) rf current generating the azimuthal magnetic field B-phi(2omega) is attributed to nonlinear interactions between the fundamental frequency radial and axial magnetic fields with the azimuthal rf current. (C) 2003 American Institute of Physics.