Non-destructive roughness analysis of high aspect ratio rectangular grating sidewalls for nanostructured silicon wafer

Dario Loaldi*, Danilo Quagliotti, Matteo Calaon, Ilja Czolkos, Alicia Johansson, Theodor Nielsen, Jørgen Garnæs, Guido Tosello

*Corresponding author for this work

Research output: Contribution to conferenceConference abstract for conferenceResearchpeer-review

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Physics & Astronomy