Abstract
| Original language | English |
|---|---|
| Journal | Microelectronic Engineering |
| Volume | 212 |
| Pages (from-to) | 9-12 |
| ISSN | 0167-9317 |
| DOIs | |
| Publication status | Published - 2019 |
Keywords
- Epitaxial graphene
- Metrology
- Terahertz time-domain spectroscopy
- Mobility
- Hall measurement
- 2D materials
Cite this
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Non-contact mobility measurements of graphene on silicon carbide. / Whelan, Patrick Rebsdorf; Zhao, Xiaojing; Pasternak, Iwona; Strupinski, Wlodek; Jepsen, Peter Uhd; Bøggild, Peter.
In: Microelectronic Engineering, Vol. 212, 2019, p. 9-12.Research output: Contribution to journal › Journal article › Research › peer-review
TY - JOUR
T1 - Non-contact mobility measurements of graphene on silicon carbide
AU - Whelan, Patrick Rebsdorf
AU - Zhao, Xiaojing
AU - Pasternak, Iwona
AU - Strupinski, Wlodek
AU - Jepsen, Peter Uhd
AU - Bøggild, Peter
PY - 2019
Y1 - 2019
N2 - Non-invasive measurement techniques are of utmost importance for characterization of atomically thin materials to speed up the measurement process while avoiding mechanical damage or contamination of the fragile materials. Terahertz time-domain spectroscopy (THz-TDS) provides non-contact measurement of the frequency dependent conductivity of thin films. Here, we expand the applicability of THz-TDS by spatially mapping the carrier density and mobility of epitaxial graphene grown on silicon carbide. The extracted values are compared to Hall measurements and agrees well for homogeneously conducting samples.
AB - Non-invasive measurement techniques are of utmost importance for characterization of atomically thin materials to speed up the measurement process while avoiding mechanical damage or contamination of the fragile materials. Terahertz time-domain spectroscopy (THz-TDS) provides non-contact measurement of the frequency dependent conductivity of thin films. Here, we expand the applicability of THz-TDS by spatially mapping the carrier density and mobility of epitaxial graphene grown on silicon carbide. The extracted values are compared to Hall measurements and agrees well for homogeneously conducting samples.
KW - Epitaxial graphene
KW - Metrology
KW - Terahertz time-domain spectroscopy
KW - Mobility
KW - Hall measurement
KW - 2D materials
U2 - 10.1016/j.mee.2019.03.022
DO - 10.1016/j.mee.2019.03.022
M3 - Journal article
VL - 212
SP - 9
EP - 12
JO - Microelectronic Engineering
JF - Microelectronic Engineering
SN - 0167-9317
ER -