Noise Depression of Parasitic Capacitance for Frequency Detection of Micromechanical Bulk Disk Resonator

Meng Tang, Alberto Cagliani, Marie Escouflaire, Se´verine Mouisel, Zachary J Davis

    Research output: Chapter in Book/Report/Conference proceedingArticle in proceedingsResearchpeer-review

    Abstract

    A bulk disk resonator working in dynamic mode is used for mass detection. In the capacitive transduction scheme, the parasitic capacitance between the electrodes produces an anti resonance in the transmission curve, which distorts the phase shift at the resonant frequency and increases the frequency noise of the system. A capacitor cancellation circuit is used to subtract the parasitic capacitor. Measurements are conducted before and after the cancellation, and results show that after cancellation, the anti resonance is suppressed and the frequency noise is decreased, thus decreasing the minimal detectable mass of the sensor.
    Original languageEnglish
    Title of host publication5th IEEE International Conference on Nano/Micro Engineered and Molecular System, 2010
    PublisherIEEE
    Publication date2010
    Pages728 - 731
    DOIs
    Publication statusPublished - 2010
    EventInternational Conference on Nano/Micro Engineered and Molecular Systems - Xiamen
    Duration: 20 Jan 201023 Jan 2010
    Conference number: 5

    Conference

    ConferenceInternational Conference on Nano/Micro Engineered and Molecular Systems
    Number5
    CityXiamen
    Period20/01/201023/01/2010

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