Abstract
A bulk disk resonator working in dynamic mode is used for mass detection. In the capacitive transduction scheme, the parasitic capacitance between the electrodes produces an anti resonance in the transmission curve, which distorts the phase shift at the resonant frequency and increases the frequency noise of the system. A capacitor cancellation circuit is used to subtract the parasitic capacitor. Measurements are conducted before and after the cancellation, and results show that after cancellation, the anti resonance is suppressed and the frequency noise is decreased, thus decreasing the minimal detectable mass of the sensor.
Original language | English |
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Title of host publication | 5th IEEE International Conference on Nano/Micro Engineered and Molecular System, 2010 |
Publisher | IEEE |
Publication date | 2010 |
Pages | 728 - 731 |
DOIs | |
Publication status | Published - 2010 |
Event | International Conference on Nano/Micro Engineered and Molecular Systems - Xiamen Duration: 20 Jan 2010 → 23 Jan 2010 Conference number: 5 |
Conference
Conference | International Conference on Nano/Micro Engineered and Molecular Systems |
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Number | 5 |
City | Xiamen |
Period | 20/01/2010 → 23/01/2010 |