Noise Depression of Parasitic Capacitance for Frequency Detection of Micromechanical Bulk Disk Resonator

Meng Tang, Alberto Cagliani, Marie Escouflaire, Se´verine Mouisel, Zachary J Davis

    Research output: Contribution to journalConference articleResearch

    Abstract

    A bulk disk resonator working in dynamic mode is used for mass detection. In the capacitive transduction scheme, the parasitic capacitance between the electrodes produces an anti resonance in the transmission curve, which distorts the phase shift at the resonant frequency and increases the frequency noise of the system. A capacitor cancellation circuit is used to subtract the parasitic capacitor. Measurements are conducted before and after the cancellation, and results show that after cancellation, the anti resonance is suppressed and the frequency noise is decreased, thus decreasing the minimal detectable mass of the sensor.
    Original languageEnglish
    Journal2010 5th IEEE International Conference on Nano/Micro Engineered and Molecular Systems (NEMS 2010)
    Pages (from-to)728 - 731
    DOIs
    Publication statusPublished - 2010
    EventInternational Conference on Nano/Micro Engineered and Molecular Systems : IEEE - Xiamen
    Duration: 1 Jan 2010 → …
    Conference number: 5

    Conference

    ConferenceInternational Conference on Nano/Micro Engineered and Molecular Systems : IEEE
    Number5
    CityXiamen
    Period01/01/2010 → …

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