Nickel silicide thermal stability: effects of oxygen anneal and silicon microstructure

Sune Thorsteinsson; Søren Jensen; Ulrich Quaade; A.N. Larsen; J.L. Hansen; Ole Hansen

Nickel silicide thermal stability: effects of oxygen anneal and silicon microstructure

Sune Thorsteinsson, Søren Jensen, Ulrich Quaade, A.N. Larsen, J.L. Hansen, Ole Hansen

Research output: Chapter in Book/Report/Conference proceeding › Article in proceedings › Research › peer-review

Original language	English
Title of host publication	Proceedings of the 20th European Conference on Solid-State Transducers, Eurosensors XX, Gothenburg, Sweden, September 17-20, 2006, paper #W2C-P3
Place of Publication	Gothenburg, Sweden
Publication date	2006
Publication status	Published - 2006
Event	20th European Conference on Solid-State Transducers - Göteborg, Sweden Duration: 17 Sept 2006 → 20 Sept 2006 Conference number: 20 http://www.mc2.chalmers.se/conferences/EUROSENSORS2006/

Conference

Conference	20th European Conference on Solid-State Transducers
Number	20
Country/Territory	Sweden
City	Göteborg
Period	17/09/2006 → 20/09/2006
Internet address	http://www.mc2.chalmers.se/conferences/EUROSENSORS2006/

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@inproceedings{565c8f2ee1914c51ad8d672d0ff8e621,

title = "Nickel silicide thermal stability: effects of oxygen anneal and silicon microstructure",

author = "Sune Thorsteinsson and S{\o}ren Jensen and Ulrich Quaade and A.N. Larsen and J.L. Hansen and Ole Hansen",

year = "2006",

language = "English",

booktitle = "Proceedings of the 20th European Conference on Solid-State Transducers, Eurosensors XX, Gothenburg, Sweden, September 17-20, 2006, paper #W2C-P3",

note = "20th European Conference on Solid-State Transducers, Eurosensors XX ; Conference date: 17-09-2006 Through 20-09-2006",

url = "http://www.mc2.chalmers.se/conferences/EUROSENSORS2006/",

}

Thorsteinsson, S, Jensen, S, Quaade, U, Larsen, AN, Hansen, JL & Hansen, O 2006, Nickel silicide thermal stability: effects of oxygen anneal and silicon microstructure. in Proceedings of the 20th European Conference on Solid-State Transducers, Eurosensors XX, Gothenburg, Sweden, September 17-20, 2006, paper #W2C-P3. Gothenburg, Sweden, 20th European Conference on Solid-State Transducers, Göteborg, Sweden, 17/09/2006.

Nickel silicide thermal stability: effects of oxygen anneal and silicon microstructure. / Thorsteinsson, Sune; Jensen, Søren; Quaade, Ulrich et al.
Proceedings of the 20th European Conference on Solid-State Transducers, Eurosensors XX, Gothenburg, Sweden, September 17-20, 2006, paper #W2C-P3. Gothenburg, Sweden, 2006.

Research output: Chapter in Book/Report/Conference proceeding › Article in proceedings › Research › peer-review

TY - GEN

T1 - Nickel silicide thermal stability: effects of oxygen anneal and silicon microstructure

AU - Thorsteinsson, Sune

AU - Jensen, Søren

AU - Quaade, Ulrich

AU - Larsen, A.N.

AU - Hansen, J.L.

AU - Hansen, Ole

N1 - Conference code: 20

PY - 2006

Y1 - 2006

M3 - Article in proceedings

BT - Proceedings of the 20th European Conference on Solid-State Transducers, Eurosensors XX, Gothenburg, Sweden, September 17-20, 2006, paper #W2C-P3

CY - Gothenburg, Sweden

T2 - 20th European Conference on Solid-State Transducers

Y2 - 17 September 2006 through 20 September 2006

ER -