Nickel silicide thermal stability: effects of oxygen anneal and silicon microstructure

Sune Thorsteinsson, Søren Jensen, Ulrich Quaade, A.N. Larsen, J.L. Hansen, Ole Hansen

Research output: Chapter in Book/Report/Conference proceedingArticle in proceedingsResearchpeer-review

Original languageEnglish
Title of host publicationProceedings of the 20th European Conference on Solid-State Transducers, Eurosensors XX, Gothenburg, Sweden, September 17-20, 2006, paper #W2C-P3
Place of PublicationGothenburg, Sweden
Publication date2006
Publication statusPublished - 2006
Event20th European Conference on Solid-State Transducers - Göteborg, Sweden
Duration: 17 Sep 200620 Sep 2006
Conference number: 20
http://www.mc2.chalmers.se/conferences/EUROSENSORS2006/

Conference

Conference20th European Conference on Solid-State Transducers
Number20
CountrySweden
CityGöteborg
Period17/09/200620/09/2006
Internet address

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