Abstract
The present report is a documentation of measurements carried out at DTU on Nickel replicas.
The research is performed in the frame of the project with contract SMT4-CT97-2176 with title: Calibration Standards for Surface Topography Measuring Systems down to Nanometric Scale.
| Original language | English |
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| Publisher | Technical University of Denmark |
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| Number of pages | 312 |
| Publication status | Published - 2000 |
Keywords
- MM00.25
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