A novel technique for fabrication of linear arrays of high frequency piezoelectric Micromachined Ultrasound Transducers (pMUT) on silicon substrates is presented. Piezoelectric elements are formed by deposition of PZT ((PbZrxTi1-x)O3) into etched features of the silicon substrate such that the depth of these features determine the element thickness and hence the resonance frequency. The process leaves a near planar surface which is ideal for further wafer level processing such as top electrode and interconnect formation. A fabricated single element is characterized by pulse echo response.
|Title of host publication||IEEE Ultrasonics Symposium, 2008. IUS 2008.|
|Publication status||Published - 2008|
|Event||2008 IEEE International Ultrasonics Symposium - Beijing, China|
Duration: 2 Nov 2008 → 5 Nov 2008
|Conference||2008 IEEE International Ultrasonics Symposium|
|Period||02/11/2008 → 05/11/2008|