New technique for fabrication of high frequency piezoelectric Micromachined Ultrasound Transducers

T Pedersen; Erik Vilain Thomsen; T Zawada; K Hansen; R Lou-Møller

doi:10.1109/ULTSYM.2008.0523

New technique for fabrication of high frequency piezoelectric Micromachined Ultrasound Transducers

T Pedersen, Erik Vilain Thomsen, T Zawada, K Hansen, R Lou-Møller

Research output: Chapter in Book/Report/Conference proceeding › Article in proceedings › Research › peer-review

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Abstract

A novel technique for fabrication of linear arrays of high frequency piezoelectric Micromachined Ultrasound Transducers (pMUT) on silicon substrates is presented. Piezoelectric elements are formed by deposition of PZT ((PbZrxTi1-x)O3) into etched features of the silicon substrate such that the depth of these features determine the element thickness and hence the resonance frequency. The process leaves a near planar surface which is ideal for further wafer level processing such as top electrode and interconnect formation. A fabricated single element is characterized by pulse echo response.

Original language	English
Title of host publication	IEEE Ultrasonics Symposium, 2008. IUS 2008.
Publisher	IEEE
Publication date	2008
ISBN (Print)	978-1-4244-2428-3
DOIs	https://doi.org/10.1109/ULTSYM.2008.0523
Publication status	Published - 2008
Event	2008 IEEE International Ultrasonics Symposium - Beijing, China Duration: 2 Nov 2008 → 5 Nov 2008 http://ewh.ieee.org/conf/ius_2008/

Conference

Conference	2008 IEEE International Ultrasonics Symposium
Country	China
City	Beijing
Period	02/11/2008 → 05/11/2008
Internet address	http://ewh.ieee.org/conf/ius_2008/

Bibliographical note

Copyright: 2008 IEEE. Personal use of this material is permitted. However, permission to reprint/republish this material for advertising or promotional purposes or for creating new collective works for resale or redistribution to servers or lists, or to reuse any copyrighted component of this work in other works must be obtained from the IEEE

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10.1109/ULTSYM.2008.0523

PedersenFinal published version, 1.71 MB

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Cite this

@inproceedings{28260ce74696442faf56e5a1f413597d,

title = "New technique for fabrication of high frequency piezoelectric Micromachined Ultrasound Transducers",

abstract = "A novel technique for fabrication of linear arrays of high frequency piezoelectric Micromachined Ultrasound Transducers (pMUT) on silicon substrates is presented. Piezoelectric elements are formed by deposition of PZT ((PbZrxTi1-x)O3) into etched features of the silicon substrate such that the depth of these features determine the element thickness and hence the resonance frequency. The process leaves a near planar surface which is ideal for further wafer level processing such as top electrode and interconnect formation. A fabricated single element is characterized by pulse echo response.",

author = "T Pedersen and Thomsen, {Erik Vilain} and T Zawada and K Hansen and R Lou-M{\o}ller",

note = "Copyright: 2008 IEEE. Personal use of this material is permitted. However, permission to reprint/republish this material for advertising or promotional purposes or for creating new collective works for resale or redistribution to servers or lists, or to reuse any copyrighted component of this work in other works must be obtained from the IEEE; 2008 IEEE International Ultrasonics Symposium, IUS ; Conference date: 02-11-2008 Through 05-11-2008",

year = "2008",

doi = "10.1109/ULTSYM.2008.0523",

language = "English",

isbn = "978-1-4244-2428-3",

booktitle = "IEEE Ultrasonics Symposium, 2008. IUS 2008.",

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TY - GEN

T1 - New technique for fabrication of high frequency piezoelectric Micromachined Ultrasound Transducers

AU - Pedersen, T

AU - Thomsen, Erik Vilain

AU - Zawada, T

AU - Hansen, K

AU - Lou-Møller, R

N1 - Copyright: 2008 IEEE. Personal use of this material is permitted. However, permission to reprint/republish this material for advertising or promotional purposes or for creating new collective works for resale or redistribution to servers or lists, or to reuse any copyrighted component of this work in other works must be obtained from the IEEE

PY - 2008

Y1 - 2008

N2 - A novel technique for fabrication of linear arrays of high frequency piezoelectric Micromachined Ultrasound Transducers (pMUT) on silicon substrates is presented. Piezoelectric elements are formed by deposition of PZT ((PbZrxTi1-x)O3) into etched features of the silicon substrate such that the depth of these features determine the element thickness and hence the resonance frequency. The process leaves a near planar surface which is ideal for further wafer level processing such as top electrode and interconnect formation. A fabricated single element is characterized by pulse echo response.

AB - A novel technique for fabrication of linear arrays of high frequency piezoelectric Micromachined Ultrasound Transducers (pMUT) on silicon substrates is presented. Piezoelectric elements are formed by deposition of PZT ((PbZrxTi1-x)O3) into etched features of the silicon substrate such that the depth of these features determine the element thickness and hence the resonance frequency. The process leaves a near planar surface which is ideal for further wafer level processing such as top electrode and interconnect formation. A fabricated single element is characterized by pulse echo response.

U2 - 10.1109/ULTSYM.2008.0523

DO - 10.1109/ULTSYM.2008.0523

M3 - Article in proceedings

SN - 978-1-4244-2428-3

BT - IEEE Ultrasonics Symposium, 2008. IUS 2008.

PB - IEEE

T2 - 2008 IEEE International Ultrasonics Symposium

Y2 - 2 November 2008 through 5 November 2008

ER -