New technique for fabrication of high frequency piezoelectric Micromachined Ultrasound Transducers

T Pedersen, Erik Vilain Thomsen, T Zawada, K Hansen, R Lou-Møller

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    Abstract

    A novel technique for fabrication of linear arrays of high frequency piezoelectric Micromachined Ultrasound Transducers (pMUT) on silicon substrates is presented. Piezoelectric elements are formed by deposition of PZT ((PbZrxTi1-x)O3) into etched features of the silicon substrate such that the depth of these features determine the element thickness and hence the resonance frequency. The process leaves a near planar surface which is ideal for further wafer level processing such as top electrode and interconnect formation. A fabricated single element is characterized by pulse echo response.
    Original languageEnglish
    Title of host publicationIEEE Ultrasonics Symposium, 2008. IUS 2008.
    PublisherIEEE
    Publication date2008
    ISBN (Print)978-1-4244-2428-3
    DOIs
    Publication statusPublished - 2008
    Event2008 IEEE International Ultrasonics Symposium - Beijing, China
    Duration: 2 Nov 20085 Nov 2008
    http://ewh.ieee.org/conf/ius_2008/

    Conference

    Conference2008 IEEE International Ultrasonics Symposium
    CountryChina
    CityBeijing
    Period02/11/200805/11/2008
    Internet address

    Bibliographical note

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