New Roads to Ultra thin Silicon Oxides

P. Morgan, A. Bahari, U. Rubenhagen, J.F. Andersen, Jakob Kjelstrup-Hansen, K. Pedersen, M.G. Rao, Z.S. Li

Research output: Chapter in Book/Report/Conference proceeding › Article in proceedings › Research › peer-review

Original language	English
Title of host publication	Proceedings of the Fifth International Conference on Microelectronics and Inferfaces
Publication date	2004
Publication status	Published - 2004

OpenUrl availability

@inproceedings{6f0b835d3ddc46e8874b98fc1447781f,

title = "New Roads to Ultra thin Silicon Oxides",

author = "P. Morgan and A. Bahari and U. Rubenhagen and J.F. Andersen and Jakob Kjelstrup-Hansen and K. Pedersen and M.G. Rao and Z.S. Li",

year = "2004",

language = "English",

booktitle = "Proceedings of the Fifth International Conference on Microelectronics and Inferfaces",

}