New Masking Technique for PZT Thick Films Utilizing KOH etched Trenches

Thomas Pedersen; Christian Carstensen Hindrichsen; K. Hansen; Rasmus Lou-Møller; Erik Vilain Thomsen

New Masking Technique for PZT Thick Films Utilizing KOH etched Trenches

Thomas Pedersen, Christian Carstensen Hindrichsen, K. Hansen, Rasmus Lou-Møller, Erik Vilain Thomsen

Department of Physics

Research output: Chapter in Book/Report/Conference proceeding › Article in proceedings › Research › peer-review

Original language	English
Title of host publication	Proceeding of IMAPS/ACerS 4th International Conference and Exhibition on Ceramic Interconnect and Ceramic Microsystem Technologies
Place of Publication	Münich, Germany
Publication date	2008
Publication status	Published - 2008
Event	IMAPS/ACerS 4th International Conference and Exhibition on Ceramic Interconnect and Ceramic Microsystem Technologies - Münich, Germany Duration: 1 Jan 2008 → …

Conference

Conference	IMAPS/ACerS 4th International Conference and Exhibition on Ceramic Interconnect and Ceramic Microsystem Technologies
City	Münich, Germany
Period	01/01/2008 → …

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@inproceedings{2343c4255feb45c89eb43484f2581f56,

title = "New Masking Technique for PZT Thick Films Utilizing KOH etched Trenches",

author = "Thomas Pedersen and Hindrichsen, {Christian Carstensen} and K. Hansen and Rasmus Lou-M{\o}ller and Thomsen, {Erik Vilain}",

year = "2008",

language = "English",

booktitle = "Proceeding of IMAPS/ACerS 4th International Conference and Exhibition on Ceramic Interconnect and Ceramic Microsystem Technologies",

note = "IMAPS/ACerS 4th International Conference and Exhibition on Ceramic Interconnect and Ceramic Microsystem Technologies ; Conference date: 01-01-2008",

}

Pedersen, T, Hindrichsen, CC, Hansen, K, Lou-Møller, R & Thomsen, EV 2008, New Masking Technique for PZT Thick Films Utilizing KOH etched Trenches. in Proceeding of IMAPS/ACerS 4th International Conference and Exhibition on Ceramic Interconnect and Ceramic Microsystem Technologies. Münich, Germany, IMAPS/ACerS 4th International Conference and Exhibition on Ceramic Interconnect and Ceramic Microsystem Technologies, Münich, Germany, 01/01/2008.

New Masking Technique for PZT Thick Films Utilizing KOH etched Trenches. / Pedersen, Thomas; Hindrichsen, Christian Carstensen; Hansen, K. et al.
Proceeding of IMAPS/ACerS 4th International Conference and Exhibition on Ceramic Interconnect and Ceramic Microsystem Technologies. Münich, Germany, 2008.

Research output: Chapter in Book/Report/Conference proceeding › Article in proceedings › Research › peer-review

TY - GEN

T1 - New Masking Technique for PZT Thick Films Utilizing KOH etched Trenches

AU - Pedersen, Thomas

AU - Hindrichsen, Christian Carstensen

AU - Hansen, K.

AU - Lou-Møller, Rasmus

AU - Thomsen, Erik Vilain

PY - 2008

Y1 - 2008

M3 - Article in proceedings

BT - Proceeding of IMAPS/ACerS 4th International Conference and Exhibition on Ceramic Interconnect and Ceramic Microsystem Technologies

CY - Münich, Germany

T2 - IMAPS/ACerS 4th International Conference and Exhibition on Ceramic Interconnect and Ceramic Microsystem Technologies

Y2 - 1 January 2008

ER -