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NEMS prototyping using laser lithography

Esko Sebastian Forsén, P. Carlberg, L. Montelius, Anja Boisen

    Research output: Chapter in Book/Report/Conference proceeding › Article in proceedings › Research › peer-review

    Original languageEnglish
    Title of host publicationProceedings of the Micro and nanoengineering (MNE)
    Place of PublicationCambridge, UK
    Publication date2003
    Pages310-311
    Publication statusPublished - 2003

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