NEMS prototyping using laser lithography

Esko Sebastian Forsén, P. Carlberg, L. Montelius, Anja Boisen

    Research output: Chapter in Book/Report/Conference proceedingArticle in proceedingsResearchpeer-review

    Original languageEnglish
    Title of host publicationProceedings of the Micro and nanoengineering (MNE)
    Place of PublicationCambridge, UK
    Publication date2003
    Publication statusPublished - 2003

    Cite this

    Forsén, E. S., Carlberg, P., Montelius, L., & Boisen, A. (2003). NEMS prototyping using laser lithography. In Proceedings of the Micro and nanoengineering (MNE) (pp. 310-311).