Nanostructuring with bonding and structural studies of plasma assisted wafer bonding

R. Feidenhans'l

Research output: Contribution to conference › Conference abstract for conference › Research

Original language	English
Publication date	2002
Publication status	Published - 2002
Event	Materials Research Seminar - Technical University of Denmark, Lyngby, Denmark Duration: 28 Oct 2002 → 29 Oct 2002

Seminar	Materials Research Seminar
Location	Technical University of Denmark
Country/Territory	Denmark
City	Lyngby
Period	28/10/2002 → 29/10/2002

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