Nanostructuring with bonding and structural studies of plasma assisted wafer bonding

R. Feidenhans'l

    Research output: Contribution to conferenceConference abstract for conferenceResearch

    Original languageEnglish
    Publication date2002
    Publication statusPublished - 2002
    EventMaterials Research Seminar - Technical University of Denmark, Lyngby (DK), 28-29 Oct, Denmark
    Duration: 28 Oct 200229 Oct 2002

    Conference

    ConferenceMaterials Research Seminar
    LocationTechnical University of Denmark
    CountryDenmark
    CityLyngby (DK), 28-29 Oct
    Period28/10/200229/10/2002

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